INFRARED, Volume. 45, Issue 8, 18(2024)

Study on Wet Etching Technology for the Back of InSb Focal Plane Devices

Nan-yang MI*, Yuan-yuan LIU, Zhong-he LI, Qing WU, and Jian-zhong ZHAO
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    MI Nan-yang, LIU Yuan-yuan, LI Zhong-he, WU Qing, ZHAO Jian-zhong. Study on Wet Etching Technology for the Back of InSb Focal Plane Devices[J]. INFRARED, 2024, 45(8): 18

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    Paper Information

    Received: Oct. 16, 2023

    Accepted: --

    Published Online: Sep. 29, 2024

    The Author Email: Nan-yang MI (nanyangmi@163.com)

    DOI:10.3969/j.issn.1672-8785.2024.08.003

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