Silicon-based optical phased array with a reconfigurable aperture for “gaze” scanning of LiDAR

Heming Hu; Yafang He; Baisong Chen; Ziming Wang; Yingzhi Li; Qijie Xie; Quanxin Na; Zihao Zhi; Xuetong Li; Huan Qu; Patrick Lo; Junfeng Song

doi:10.1364/PRJ.515496

Photonics Research, Volume. 12, Issue 5, 932(2024)

Silicon-based optical phased array with a reconfigurable aperture for “gaze” scanning of LiDAR

Heming Hu1... Yafang He1, Baisong Chen1, Ziming Wang1, Yingzhi Li1, Qijie Xie2, Quanxin Na2, Zihao Zhi1, Xuetong Li1, Huan Qu1, Patrick Lo3, and Junfeng Song12,* |Show fewer author(s)

Author Affiliations

¹State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

²Peng Cheng Laboratory, Shenzhen 518000, China

³Advance Micro Foundry Pte. Ltd., Singapore 117685, Singapore

show less

References(42)

[1] M. J. R. Heck. Highly integrated optical phased arrays: photonic integrated circuits for optical beam shaping and beam steering. Nanophotonics, 6, 93-107(2017).

[2] M. X. Hu, Y. Pang, L. Gao. Advances in silicon-based integrated LiDAR. Sensors, 23, 5920(2023).

[3] N. X. Li, C. P. Ho, J. Xue. A progress review on solid-state LiDAR and nanophotonics-based LiDAR sensors. Laser Photonics Rev., 16, 2100511(2022).

[4] O. Solgaard, A. A. Godil, R. T. Howe. Optical MEMS: from micromirrors to complex systems. J. Microelectromech. Syst., 23, 517-538(2014).

[5] J. Rodriguez, B. Smith, B. Hellman. Multi-beam and single-chip LIDAR with discrete beam steering by digital micromirror device. Proc. SPIE, 10526, 105260U(2018).

[6] C. Errando-Herranz, N. L. Thomas, K. B. Gylfason. Low-power optical beam steering by microelectromechanical waveguide gratings. Opt. Lett., 44, 855-858(2019).

[7] Q. Hao, Y. Tao, J. Cao. Development of pulsed-laser three-dimensional imaging flash lidar using APD arrays. Microw. Opt. Technol. Lett., 63, 2492-2509(2021).

[8] F. Villa, F. Severini, F. Madonini. SPADs and SiPMs arrays for long-range high-speed light detection and ranging (LiDAR). Sensors, 21, 3839(2021).

[9] P. F. McManamon, P. Banks, J. Beck. Comparison of flash LiDAR detector options. Opt. Eng., 56, 031223(2017).

[10] Z. Y. Zhang, B. Chen, Q. Zhang. A fully solid-state beam scanner for FMCW LiDAR application. IEEE Photonics Technol. Lett., 35, 377-380(2023).

[11] X. Y. Cao, G. Qiu, K. Wu. LiDAR system based on lens assisted integrated beam steering. Opt. Lett., 45, 5816-5819(2020).

[12] C. Li, X. Cao, K. Wu. Lens-based integrated 2D beam-steering device with defocusing approach and broadband pulse operation for LiDAR application. Opt. Express, 27, 32970-32983(2019).

[13] C. Li, X. Cao, K. Wu. Blind zone-suppressed hybrid beam steering for solid-state LiDAR. Photonics Res., 9, 1871-1880(2021).

[14] C. Rogers, A. Y. Piggott, D. J. Thomson. A universal 3D imaging sensor on a silicon photonics platform. Nature, 590, 256-261(2021).

[15] J. Beeckman, K. Neyts, P. J. M. Vanbrabant. Liquid-crystal photonic applications. Opt. Eng., 50, 081202(2011).

[16] R. Morris, C. Jones, M. Nagaraj. Liquid crystal devices for beam steering applications. Micromachines, 12, 247(2021).

[17] J. Kolacz, H. G. Gotjen, R. Y. Bekele. Propagating transverse electric and transverse magnetic modes in liquid crystal-clad planar waveguides. Liq. Cryst., 47, 531-539(2020).

[18] C. P. Hsu, B. Li, B. Solano-Rivas. A review and perspective on optical phased array for automotive LiDAR. IEEE J. Sel. Top. Quantum Electron., 27, 8300416(2021).

[19] S. Zhao, J. Chen, Y. Shi. All-solid-state beam steering via integrated optical phased array technology. Micromachines, 13, 894(2022).

[20] H. Q. Qiu, Y. Liu, X. Meng. Energy-efficient integrated silicon optical phased array. Front. Optoelectron., 16, 23(2023).

[21] W. H. Xu, Y. Guo, X. Li. Fully integrated solid-state LiDAR transmitter on a multi-layer silicon-nitride-on-silicon photonic platform. J. Lightwave Technol., 41, 832-840(2023).

[22] Z. H. Zhi, Q. Na, Q. Xie. On-chip generation of Bessel-Gaussian beam via concentrically distributed grating arrays for long-range sensing. Light Sci. Appl., 12, 92(2023).

[23] Y. Z. Li, B. Chen, Q. Na. High-data-rate and wide-steering-range optical wireless communication via nonuniform-space optical phased array. J. Lightwave Technol., 41, 4933-4940(2023).

[24] S. P. Liu, J. Feng, Y. Tian. Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review. Front. Optoelectron., 15, 9(2022).

[25] S. A. Miller, Y.-C. Chang, C. T. Phare. Large-scale optical phased array using a low-power multi-pass silicon photonic platform. Optica, 7, 3-6(2020).

[26] Y. Q. Shuai, Z. Zhou, H. Su. Toward practical optical phased arrays through grating antenna engineering. Photonics, 10, 520(2023).

[27] B. S. Chen, Y. Li, L. Zhang. Unidirectional large-scale waveguide grating with uniform radiation for optical phased array. Opt. Express, 29, 20995-21010(2021).

[28] H. Q. Qiu, Y. Liu, X. Meng. Bidirectional high sidelobe suppression silicon optical phased array. Photonics Res., 11, 659-668(2023).

[29] L. X. Zhang, Y. Li, B. Chen. Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging. Opt. Express, 30, 5008-5018(2022).

[30] C. V. Poulton, M. J. Byrd, P. Russo. Coherent LiDAR with an 8,192-element optical phased array and driving laser. IEEE J. Sel. Top. Quantum Electron., 28, 8300416(2022).

[31] C. M. Sun, B. Li, W. Shi. Large-scale and broadband silicon nitride optical phased arrays. IEEE J. Sel. Top. Quantum Electron., 28, 8200710(2022).

[32] G. Z. Luo, L. Yu, P. Ma. A large-scale passive optical phase array with 1024 channels. IEEE Photonics Technol. Lett., 35, 927-930(2023).

[33] Y. Z. Li, B. Chen, Q. Na. Wide-steering-angle high-resolution optical phased array. Photonics Res., 9, 2511-2518(2021).

[34] D. W. Zhuang, L. Zhang, X. Han. Omnidirectional beam steering using aperiodic optical phased array with high error margin. Opt. Express, 26, 19154-19170(2018).

[35] D. Kwong, A. Hosseini, Y. Zhang. 1 × 12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane. Appl. Phys. Lett., 99, 051104(2011).

[36] A. Hosseini, D. Kwong, Y. Zhang. Modeling and experimental observation of an on-chip two-dimensional far-field interference pattern. Appl. Opt., 50, 1822-1826(2011).

[37] W. H. Xu, C. Liu, Y. Guo. Impact of aperture size on beam evolution of optical phased arrays. Optical Fiber Communications Conference and Exhibition (OFC), 1-3(2021).

[38] Z. Y. Zhou, Z. Zhang, Q. Huang. Multi-line selective optical phased array with improved uniformity of radiated beam patterns. IEEE Photonics Technol. Lett., 34, 133-136(2022).

[39] L. X. Zhang, Y.-Z. Li, M. Tao. Large-scale integrated multi-lines optical phased array chip. IEEE Photonics J., 12, 6601208(2020).

[40] S. S. S. Panda, T. Panigrahi, S. R. Parne. Recent advances and future directions of microwave photonic radars: a review. IEEE Sens. J., 21, 21144-21158(2021).

[41] F. Z. Zhang, B. Gao, S. Pan. Photonics-based MIMO radar with high-resolution and fast detection capability. Opt. Express, 26, 17529-17540(2018).

[42] X. P. Liu, K. Wang. Research on high-resolution wide-swath SAR based on microwave photonics. CIE International Conference on Radar (RADAR), 1-3(2016).

Tools

Get Citation

Copy Citation Text

Heming Hu, Yafang He, Baisong Chen, Ziming Wang, Yingzhi Li, Qijie Xie, Quanxin Na, Zihao Zhi, Xuetong Li, Huan Qu, Patrick Lo, Junfeng Song, "Silicon-based optical phased array with a reconfigurable aperture for “gaze” scanning of LiDAR," Photonics Res. 12, 932 (2024)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites