[1] [1] DONG H, WANG L L, GAO W, et al. KDP aqueous solution-in-oil microemulsion for ultra-precision chemical-mechanical polishing of KDP crystal［J］. Materials, 2017, 10(3): 271.

[2] [2] WANG C, SHI W, ZHANG Z Z, et al. Heterogeneous growth of KDP/KT crystal［J］. Chinese Physics B, 2017, 26(10): 104209.

[4] [4] HUANG S G, LU J, LIN Y C, et al. Study on the enhancement of sol-gel properties by binary compounding technology for dry polishing hard and brittle materials［J］. Journal of Sol-Gel Science and Technology, 2020, 96(2): 314-326.

[7] [7] PONTE D C, MEYER D M L. Energy dissipation and constitutive modeling for a mechanistic description of pad scratching in chemical-mechanical planarization［J］. Journal of Materials Science: Materials in Electronics, 2016, 27(2): 1745-1757.

[8] [8] LUO Y J, LIU M, WANG W, et al. Novel CMP pads by special structural design［C］//2018 China Semiconductor Technology International Conference (CSTIC). March 11-12, 2018, Shanghai, China. IEEE, 2018: 1-3.

[9] [9] ZHENG F Z, ZHU N N, ZHU Y W, et al. Self-conditioning performance of hydrophilic fixed abrasive pad［J］. The International Journal of Advanced Manufacturing Technology, 2017, 90(5/6/7/8): 2217-2222.

[13] [13] HO J K, HUANG C Y, TSAI M Y, et al. Investigation of polishing pads impregnated with Fe and Al2O3 particles for single-crystal silicon carbide wafers［J］. Applied Sciences, 2016, 6(3): 89.

[14] [14] PARK J, JUNG H, YOSHIDA K, et al. Pad surface treatment to control performance of chemical mechanical planarization［J］. Japanese Journal of Applied Physics, 2008, 47(2): 1028-1033.

[15] [15] LEE D, LEE H. Estimating the mechanical properties of polyurethane-impregnated felt pads［J］. Journal of Mechanical Science and Technology, 2017, 31(12): 5705-5710.

[16] [16] SATAKE U, ENOMOTO T, OBAYASHI Y, et al. Reducing edge roll-off during polishing of substrates［J］. Precision Engineering, 2018, 51: 97-102.

[24] [24] SCHOLZ R, FROST R L, FROTA L, et al. SEM, EDX and vibrational spectroscopy of the phosphate mineral vauxite from Llallagua, Bolívia［J］. Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy, 2015, 151: 149-155.

[25] [25] FROST R L, PALMER S J, XI Y F. A Raman spectroscopic study of the mono-hydrogen phosphate mineral dorfmanite Na2(PO3OH)·2H2O and in comparison with brushite［J］. Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy, 2011, 82(1): 132-136.

[26] [26] FROST R L, XI Y F, SCHOLZ R, et al. Vibrational spectroscopic characterization of the phosphate mineral series eosphorite-childrenite-(Mn, Fe)Al(PO4)(OH)2·(H2O)［J］. Vibrational Spectroscopy, 2013, 67: 14-21.