Acta Optica Sinica, Volume. 45, Issue 7, 0712005(2025)
Phase Noise Suppression Method in White Light Interferometry Measurement System
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Lei Nie, Yijun Xie, Yixin Xu, Xuanze Wang, Hang Zhao, Zhengqiong Dong, Jinlong Zhu. Phase Noise Suppression Method in White Light Interferometry Measurement System[J]. Acta Optica Sinica, 2025, 45(7): 0712005
Category: Instrumentation, Measurement and Metrology
Received: Dec. 27, 2024
Accepted: Feb. 25, 2025
Published Online: Apr. 15, 2025
The Author Email: Jinlong Zhu (jinlongzhu03@hust.edu.cn)
CSTR:32393.14.AOS241953