Acta Optica Sinica, Volume. 45, Issue 7, 0712005(2025)

Phase Noise Suppression Method in White Light Interferometry Measurement System

Lei Nie1, Yijun Xie1, Yixin Xu1, Xuanze Wang1, Hang Zhao2, Zhengqiong Dong1, and Jinlong Zhu2、*
Author Affiliations
  • 1Key Laboratory of Modern Manufacture Quality Engineering, Hubei University of Technology, Wuhan 430068, Hubei, China
  • 2State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China
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    References(34)

    [8] Victor O. Measurement of the thickness of transparent coatings by interferometry[D](2020).

    [15] Xue L, Guo R H, Liu Y et al. Anti-vibration white light interferometry based on non-uniform fast Fourier transform[J]. Acta Optica Sinica, 44, 0412006(2024).

    [16] Zhao Y. Research on surface recovery algorithm in white light interferometry based on phase noise correction[D], 7-9(2023).

    [29] Zhu J. Study of key processing algorithms for white light interferometry system[D], 33-34(2023).

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    Lei Nie, Yijun Xie, Yixin Xu, Xuanze Wang, Hang Zhao, Zhengqiong Dong, Jinlong Zhu. Phase Noise Suppression Method in White Light Interferometry Measurement System[J]. Acta Optica Sinica, 2025, 45(7): 0712005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 27, 2024

    Accepted: Feb. 25, 2025

    Published Online: Apr. 15, 2025

    The Author Email: Jinlong Zhu (jinlongzhu03@hust.edu.cn)

    DOI:10.3788/AOS241953

    CSTR:32393.14.AOS241953

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