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Chinese Journal of Lasers, Volume. 46, Issue 12, 1203001(2019)

Fabrication of Holographic Lithography Micro-Nano Gratings Using Metal Mask

Chunyang Gong1, Jie Fan1、*, Yonggang Zou1, Haizhu Wang1, Xin Zhao1, Xiaohui Ma1, Chao Cui2, and Zinan Song2
Author Affiliations
  • 1State Key Laboratory of High Power Semiconductor Laser, Changchun University of Science and Technology,Changchun, Jilin 130022, China
  • 2The First Military Representative Office of the Army in Changchun, Changchun, Jilin 130103, China
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    Chunyang Gong, Jie Fan, Yonggang Zou, Haizhu Wang, Xin Zhao, Xiaohui Ma, Chao Cui, Zinan Song. Fabrication of Holographic Lithography Micro-Nano Gratings Using Metal Mask[J]. Chinese Journal of Lasers, 2019, 46(12): 1203001

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    Paper Information

    Category: materials and thin films

    Received: Jul. 24, 2019

    Accepted: Sep. 2, 2019

    Published Online: Dec. 2, 2019

    The Author Email: Fan Jie (fanjie@cust.edu.cn)

    DOI:10.3788/CJL201946.1203001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology