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Optics and Precision Engineering, Volume. 16, Issue 2, 229(2008)

Mathematic model and experiment verification of spin-coating on concave spherical substrate

[in Chinese]1, [in Chinese]1,2, and [in Chinese]1,2
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    [1] [1] LAWRENCE C J.The mechanics of spin coating of polymer film[J].Phys.Fluids,1988,31(10):2786-2795.

    [2] [2] HE Z Y,HAN L Y,ZHAO G Y,et al..Investigation into the flange problem of resist along the edge of substrate caused by spin coating[J].Microelectronic Engineering,2002,63(4):347-352.

    [3] [3] ACRIVOS A,SHAN M J,PETERSEN E E.On the flow of a non-newtonian liquid on a rotating disk[J].J.Appl.Phys,1960,31(6):963-968.

    [4] [4] MEYERHOFER D.Characteristics of resist film produced by spinning[J].J.Appl.Phys,1978,49(7):3993-3997.

    [5] [5] FENG X G,SUN L C.Mathematical model of spin-coated photoresist on a spherical substrate[J].Optics Express,2005,13(18):7070-7075.

    [6] [6] YUE H D,PAN L F,BIN Y J,et al..Mechanics analysis in CD-R dye coating process[J].SPIE,2002,4930:253-257.

    [8] [8] XIE Y J,LU Z W,LI F Y.Fabrication of large diffractive optical elements in thick film on a concave lens surface[J].Optics Express,2003,11(9):992-995.

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    [in Chinese], [in Chinese], [in Chinese]. Mathematic model and experiment verification of spin-coating on concave spherical substrate[J]. Optics and Precision Engineering, 2008, 16(2): 229

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    Paper Information

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    Received: Sep. 20, 2007

    Accepted: --

    Published Online: Jul. 8, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology