Opto-Electronic Engineering, Volume. 51, Issue 12, 240209-1(2024)

A method for suppressing aiming error of dynamic goniometer

Shidong Yang1, Weibin Zhu1、*, Yao Huang2, Jin Zhu3, and Zi Xue2
Author Affiliations
  • 1College of Metrology Measurement and Instrument, China Jiliang University, Hangzhou, Zhejiang 310018, China
  • 2National Institute of Metrology, Beijing 100029, China
  • 3Zhejiang Institute of Quality Sciences, Hangzhou, Zhejiang 310019, China
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    Figures & Tables(9)
    Schematic diagram of the composition and working principle of the dynamic goniometer. (a) Composition of the dynamic goniometer; (b) A side aiming diagram; (c) B side aiming diagram
    Dynamic aiming error diagram
    Schematic diagram of the Gaussian spot intensity distribution on the PSD photosensitive surface
    Device diagram of dynamic targeting repeatability experiment system
    Repeatability of aiming on each edge surface
    Dynamic aiming error at different rotational speeds. (a) Dynamic aiming method based on light intensity threshold; (b) PSD dynamic aiming method
    Experimental setup diagram for dynamic measurement of angle blocks
    • Table 1. Specifications of main instruments

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      Table 1. Specifications of main instruments

      仪器名称型号(制造商)技术参数
      气浮转台/重复性:±0.2″; 最高转速:200°/s
      圆光栅盘RESM20 USA150(Renishaw)23600刻线 栅矩:20 μm
      编码器读数头\细分盒T1011-30A\Ti1000(Renishaw)细分倍率:1000; 角分辨力:0.055″
      23面多面棱体上海荣量等级:三等扩展; 不确定度:0.1″
      FPGA电路自制工作频率:50 MHz
      光强阈值动态瞄准器自制RS422差分触发
      PSD动态瞄准器自制RS422差分触发
    • Table 2. Angle block measurement results

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      Table 2. Angle block measurement results

      测量次数A面测角值B面测角值工作角测量值
      1290°36′25.34″65°6′22.80″45°30′2.54″
      2290°36′25.18″65°6′22.91″45°30′2.27″
      3290°36′25.29″65°6′22.91″45°30′2.38″
      4290°36′25.23″65°6′22.80″45°30′2.43″
      5290°36′25.18″65°6′22.91″45°30′2.27″
      6290°36′25.40″65°6′23.02″45°30′2.38″
      7290°36′25.07″65°6′22.80″45°30′2.27″
      8290°36′25.23″65°6′22.86″45°30′2.37″
      9290°36′25.34″65°6′22.86″45°30′2.48″
      10290°36′25.29″65°6′22.80″45°30′2.49″
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    Shidong Yang, Weibin Zhu, Yao Huang, Jin Zhu, Zi Xue. A method for suppressing aiming error of dynamic goniometer[J]. Opto-Electronic Engineering, 2024, 51(12): 240209-1

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    Paper Information

    Category: Article

    Received: Sep. 2, 2024

    Accepted: Nov. 21, 2024

    Published Online: Feb. 21, 2025

    The Author Email:

    DOI:10.12086/oee.2024.240209

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