[2] [2] Sandia National Laboratories. 2013 LDRD Annual Report[R]. 2013:528-529.

[3] [3] OUDEA Coumar, FLORENT Miller, NADINE Buard, et al. Total dose effects and SEE screening on MEMS COTS accelerometers[J]. IEEE Radiation Effects Data Workshop, 2004:125-129.

[4] [4] KNUDSON A R,BUCHNER S, MCDONALD P,et al. The effects of radiation on MEMS accelerometers[J]. IEEE Transactions on Nuclear Science, 1996,43(6):3122-3126.

[5] [5] LEE C I,JOHNSTON A H,TANG W C,et al. Total dose effects on Micro-Electro-Mechanical Systems(MEMS):accelerometers[J].IEEE Transactions on Nuclear Science, 1996,43(6):3127-3132.

[6] [6] EDMONDS L D,SWIFT G M,LEE C I. Radiation response of a MEMS accelerometer:an electrostatic force[J]. IEEE Transactions on Nuclear Science, 1998,45(6):2779-2788.

[7] [7] SHEA H R. Radiation sensitivity of microelectromechanical system devices[J]. Journal of Micro/Nanolithography MEMS and MOEMS, 2009,8(3):767-772.

[8] [8] SROUR J R, MARSHALL C J, MARSHALL P W. Review of displacement damage effects in silicon devices[J]. IEEE Transactions on Nuclear Science, 2003(3):653-670.

[9] [9] WANG Lei, TANG Jieying, HUANG Qing'an. Gamma irradiation effects on surface-micromachined polysilicon resonators[J].Journal of Microelectromechanical Systems, 2011,20(5):1071-1073.

[10] [10] PETROS Gkotsis,VALERIYA Kilchytska,CHARALAMPOS Fragkiadakis,et al. Effects of fast neutrons on the electromechanical properties of materials used in microsystems[J]. Journal of Microelectromechanical Systems, 2012,21(6):1471-1483.

[11] [11] BANDI Tobias, POLIDO-GOMES Joao, NEELS Antonia, et al. Proton-radiation tolerance of silicon and SU-8 as structural materials for high-reliability MEMS[J]. Journal of Microelectromechanical Systems, 2013,22(6):1395-1402.

[12] [12] GONG Huiqi, LIAO Wenjun, ZHANG Enxia, et al. Proton-induced displacement damage and total-ionizing-dose effects on silicon-based MEMS resonators[J]. IEEE Transactions on Nuclear Science, 2018,65(1):34-38.

[14] [14] SCHANWALD L P, SCHWANK J R, SNIEGOWSKI J J, et al. Radiation effects on surface micromachined comb drives and microengines[J]. IEEE Transactions on Nuclear Science, 1998,45(6):2789-2798.

[15] [15] STEVEN S, MCCLURE L D, EDMONDS R, et al. Radiation effects in Micro-Electro-Mechanical Systems(MEMS): RF relays[J].IEEE Transactions on Nuclear Science, 2002,49(6):3197-3202.