Fig. 1. Schematic diagram of femtosecond laser processing system

Fig. 2. Photoresist structures processed by femtosecond laser processing system. (a) Oriental Pearl Tower; (b) western dragon

Fig. 3. Response deformations and compositions of thermosensitive hydrogel. (a) Diagram of shrinkage of thermosensitive hydrogel; (b) optical microscope images of expansion and contraction of disc-shaped thermosensitive hydrogel; (c) chemical structures of thermosensitive hydrogel precursors

Fig. 4. Factors influencing shrinking ratio of thermosensitive hydrogels. (a) Effect of laser power on shrinking ratio; (b) effect of laser scanning spacing on shrinking ratio

Fig. 5. Micro-actuator composed of hydrogel and photoresist. (a) Structural diagram of micro-actuator; (b) optical microscope images of actuator before and after deformation; (c) effect of scanning spacing of photoresist on deformation angle; (d) effect of thickness of deformed part of photoresist on deformation angle

Fig. 6. Microvalves (scale bar of 20 μm). (a) Optical microscope images of closed and opened microvalves; (b) fluorescence microscope images of closed and opened microvalves; (c) scanning electron microscope image of microvalve; (d) simulation of deformed microvalve

Fig. 7. Bionic shell micro-actuators (scale bar of 20 μm). (a) Structural diagram of bionic shell; (b) optical microscope images of opened and closed bionic shells; (c) optical microscope images of opened and closed bionic shell after capturing particle; (d) scanning electron microscope image of closed bionic shell with nothing; (e) scanning electron microscope image of closed bionic shell after capturing particle