Fig. 1. Traces of high speed mirror reciprocating progressive scanning

Fig. 2. Relationship between feedback signals of mirror driving board and image quality. (a) Dislocation signal feedback; (b) reconstructed dislocation Airy spot corresponding to Fig. 2(a); (c) ideal signal feedback; (d) reconstructed Airy spot corresponding to Fig. 2(c)

Fig. 3. Block diagram of dislocation correction algorithm

Fig. 4. Flow chart of imaging dislocation evaluation algorithm based on morphological gradient

Fig. 5. Flow chart of single-objective constrained optimization particle swarm algorithm

Fig. 6. Imaging dislocation correction in double-glvanometer scanning. (a) Before correction; (b) after correction; (c) gray value and pixel relationship curve of the red line in dislocation image corresponding to Fig. 6(a); (d) gray value and pixel relationship curve of the red line in correction image corresponding to Fig. 6(b)

Fig. 7. Relationship between ΔS and EMGD in double-galvanometer scanning

Fig. 8. Imaging dislocation correction in resonant-galvanometer scanning. (a) Before correction; (b) after correction; (c) gray value and pixel relationship curve of the red line in dislocation image corresponding to Fig. 8(a); (d) gray value and pixel relationship curve of the red line in correction image corresponding to Fig. 8(b)

Fig. 9. Relationship between ΔS and EMGD in resonant-galvanometer scanning