Fig. 1. Diagram of LIBS experimental set-up for detecting CIGS thin film

Fig. 2. XRD spectrum of CIGS thin film

Fig. 3. LIBS spectra of CIGS thin film. (a) Spectral lines of Cu, In and Ga; (b) spectral lines of Cu I 327.39 nm at various working pressures

Fig. 4. Curves of LIBS intensity ratio and (a) xCu/x(In+Ga) or (b) xGa/x(In+Ga)

Fig. 5. LIBS intensity ratio of analytical spectral line of CIGS thin film deposited at various pressures

Fig. 6. Transmittance of CIGS thin films deposited at various pressures