CMOS-compatible UV–NIR high-responsivity photodetector based on flat femtosecond-laser sulfur-hyperdoped silicon

Guanting Song; Xu Zhou; Jiaxin Cao; Ziyang Zheng; Qiang Wu; Jingjun Xu

doi:10.3788/COL202523.091602

Chinese Optics Letters, Volume. 23, Issue 9, 091602(2025)

CMOS-compatible UV–NIR high-responsivity photodetector based on flat femtosecond-laser sulfur-hyperdoped silicon

Guanting Song^1,2, Xu Zhou^1,2、*, Jiaxin Cao^1,2, Ziyang Zheng^1,2, Qiang Wu^1,2、**, and Jingjun Xu^1,2

¹Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, TEDA Institute of Applied Physics and School of Physics, Nankai University, Tianjin 300457, China

²Shenzhen Research Institute of Nankai University, Shenzhen 518083, China

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Guanting Song, Xu Zhou, Jiaxin Cao, Ziyang Zheng, Qiang Wu, Jingjun Xu, "CMOS-compatible UV–NIR high-responsivity photodetector based on flat femtosecond-laser sulfur-hyperdoped silicon," Chin. Opt. Lett. 23, 091602 (2025)

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