[1] Tianhe WANG, Mengxian SUN, Jianping HUANG. Research review on dust and pollution using spaceborne lidar in China. Transactions of Atmospheric Sciences, 43, 144-158(2020).

[2] Yan HE, Shanjiang HU, Weibiao CHEN et al. Research progress of domestic airborne dual-frequency LiDAR detection technology. Laser & Optoelectronics Progress, 55, 7-17(2018).

[3] Guojun ZHAI, Motao HUANG, Yongzhong OUYANG et al. Key technologies related to the development of airborne laser bathymetry system. Hydrographic Surveying and Charting, 34, 73-76(2014).

[4] Jianing DONG, Jie FAN, Haizhu WANG et al. Research progress in laser damage of high reflective optical thin films. Chinese Optics, 11, 931-948(2018).

[5] Yuyao LI, Fei WANG, Tongtong SUN. Calibration technology of laser-induced damage threshold of thin films. Laser Technology, 45, 729-734(2021).

[6] Yong CHENG, Yimin LU, Huang TANG et al. Researches on laser damage resistance of optical films. High Power Laser and Particle Beams, 28, 7-15(2016).

[7] Zhengxiu FAN. Development and recent progress of optical thin films. Acta Optica Sinica, 31, 276-280(2011).

[8] [8] WERNHAM D, PIEGARI A. Optical Coatings in The Space Environment[M]. Cambridge: Woodhead Publishing, 2018: 789811.

[9] Xinbin CHENG, Zhengxiang SHEN, Hongfei JIAO et al. Preparation of SiO₂/HfO₂ high reflectors. High Power Laser and Particle Beams, 24, 1276-1280(2012).

[10] C J STOLZ, R A NEGRES. Ten-year summary of the Boulder Damage Symposium annual thin film laser damage competition. Optical Engineering, 57(2018).

[11] [11] RIEDE W, JENSEN L, JUPE M, et al. Damage threshold investigations of highpower laser optics under atmospheric vacuum conditions[C]Boulder Damage Symposium XXXVIII. 2006, 6403: 291300.

[12] J B OLIVER, P KUPINSKI, A L RIGATTI et al. Stress compensation in hafnia/silica optical coatings by inclusion of alumina layers. Optics Express, 20, 16596-16610(2012).

[13] X CHENG, S DONG, S ZHI et al. Waterproof coatings for high-power laser cavities. Light: Science & Applications, 8, 1-6(2019).

[14] T ZENG, M ZHU, C YIN et al. Strategy to improve the long-term stability of low-stress e-beam coatings. Optical Materials Express, 10, 2738-2748(2020).

[15] Shanshan DUAN, Changyong SHI, Lizhen YANG et al. The recent development and future of atomic layer deposition of alumina thin films. Vaccum, 58, 13-20(2021).

[16] P F CARCIA, R S MCLEAN, M H REILLY. Permeation measurements and modeling of highly defective Al₂O₃ thin films grown by atomic layer deposition on polymers. Applied Physics Letters, 97, 221901(2010).

[17] M D GRONER, S M GEORGE, R S MCLEAN et al. Gas diffusion barriers on polymers using Al₂O₃ atomic layer deposition. Applied Physics Letters, 88, 051907(2006).

[18] S M GEORGE. Atomic layer deposition: an overview. Chemical Reviews, 110, 111-131(2010).

[19] Z WANG, G BAO, H JIAO et al. Interfacial damage in a Ta₂O₅/SiO₂ double cavity filter irradiated by 1064 nm nanosecond laser pulses. Optics Express, 21, 30623-30632(2013).

[20] X LING, G WANG, Y ZHAO et al. Laser-induced damage of the optical films prepared by electron beam evaporation and ion beam sputtering in vacuum. Optik, 125, 6474-6477(2014).

[21] Qian ZHANG, Hongfei JIAO, Xinbin CHENG et al. Analysis of optical and damage properties for several ultraviolet thin film materials. Infrared and Laser Engineering, 43, 1230-1234(2014).

[22] T ZENG, M ZHU, Y CHAI et al. Effects of water adsorption on properties of electron-beam HfO₂/SiO₂ high-reflection coatings. Thin Solid Films, 697, 137826(2020).

[23] Shuzheng SHI, Liyong MA, Zhanying WANG. Preparation by atomic layer deposition and spectroscopic ellipsometry of amorphous aluminium oxide films. Micronanoelectronic Technology, 59, 1218-1225, 1241(2022).

[24] Yang ZHAO, Yu HE, Hongfei JIAO et al. Preparation of oxide films in TM laser cavity mirrors with high damage threshold. Infrared and Laser Engineering, 45, 0521001(2016).