Effect of Focus Locking Performance of Piezoelectric Ceramics on Exposure Uniformity of Lithography System

Jinlun Zheng; Jingsong Wei

doi:10.3788/AOS202242.1914001

Acta Optica Sinica, Volume. 42, Issue 19, 1914001(2022)

Effect of Focus Locking Performance of Piezoelectric Ceramics on Exposure Uniformity of Lithography System

Jinlun Zheng^1,2 and Jingsong Wei^1、*

¹Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center for Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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Jinlun Zheng, Jingsong Wei. Effect of Focus Locking Performance of Piezoelectric Ceramics on Exposure Uniformity of Lithography System[J]. Acta Optica Sinica, 2022, 42(19): 1914001

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Paper Information

Category: Lasers and Laser Optics

Received: Feb. 25, 2022

Accepted: Mar. 30, 2022

Published Online: Oct. 18, 2022

The Author Email: Wei Jingsong (weijingsong@siom.ac.cn)

DOI:10.3788/AOS202242.1914001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology