SiC/Mg Multilayer Film Reflective Mirror at 30.4 nm

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 27, Issue 4, 735(2007)

[in Chinese]^1、*, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]²

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. SiC/Mg Multilayer Film Reflective Mirror at 30.4 nm[J]. Acta Optica Sinica, 2007, 27(4): 735

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Paper Information

Category: Thin Films

Received: Aug. 8, 2006

Accepted: --

Published Online: Apr. 25, 2007

The Author Email: (jtzhu@mail.tongji.edu.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology