Laser Technology, Volume. 44, Issue 2, 156(2020)

Study on laser cleaning process of sol-gel film optical surface

GUO Naihao1, WANG Jingxuan2, and XIANG Xia1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(21)

    [1] [1] ZHANG C L, LI X B, WANG Z G, et al. Laser cleaning techniques for removing surface particulate contaminants on sol-gel SiO2 films[J]. Chinese Physics Letters, 2011, 28(7): 074205.

    [2] [2] ZHANG Ch L, YAO Ch M. Particulate contaminants removal on sol-gel film using 355nm pulsed-laser[J]. Scientia Sinica Technologica, 2016, 46(9): 926-930(in Chinese).

    [3] [3] LI H, BAI Y, YAN L H, et al. Stability of sol-gel silica coatings under ISO class 5 atmosphere condition[J]. High Power Laser and Particle Beams, 2018, 30(5): 052001(in Chinese).

    [4] [4] MIAO X X, CHENG X F, WANG H B, et al. Experiment on cleaning side of large-aperture optics in high power laser system[J]. High Power Laser and Particle Beams, 2013, 25(4): 890-894(in Chinese).

    [5] [5] XU Sh Zh, DOU H Q, HAN F M, et al. Laser cleaning of particulate contaminants on K9 glass surface[J]. Research and Exploration in Laboratory, 2017,36(6): 5-8(in Chinese).

    [6] [6] KIM T, LEE J M, CHO S H, et al. Acoustic emission monitoring during laser shock cleaning of silicon wafers[J].Optics & Lasers in Engineering, 2005, 43(9):1010-1020.

    [7] [7] LUO J F, SONG Sh J, WANG P Q, et al. Study on removal mechanism of micro-/nano-particles on silicon surface by laser plasma[J]. Laser Technology, 2018, 42(4): 567-571(in Chinese).

    [8] [8] LIU H, MIAO X X, YANG K, et al. Atmosphere pressure plasma cleaning of grease contamination on sol-gel SiO2 coating[J].High Power Laser and Particle Beams, 2015, 27(11): 112008(in Chinese).

    [9] [9] ALSHAER A W, LI L, MISTRY A. The effects of short pulse laser surface cleaning on porosity formation and reduction in laser welding of aluminium alloy for automotive component manufacture[J].Optics & Laser Technology, 2014, 64(4): 162-171.

    [10] [10] XING H N, RAN H L, ZHAO H F, et al. Development and application of laser cleaning technology[J]. Cleaning World, 2018, 34(5): 23-31(in Chinese).

    [11] [11] ZHANG Z H, YU X Ch, WANG Y, et al. Experimental study about cleaning of tire molds with pulse YAG laser[J]. Laser Technology, 2018, 42(1): 127-130(in Chinese).

    [12] [12] LIU H, YI R, LI Y X. Application of different wavelength laser cleaning technology in archaeological metal objects cleaning[J]. Laser Journal, 2019, 40(4): 149-153(in Chinese).

    [13] [13] YUE L Y, WANG Z B, LI L. Material morphological characteristics in laser ablation of alpha case form titanium alloy[J]. Applied Surface Science, 2012, 258(20): 8065-8071.

    [14] [14] ZHOU C, WANG G, CHEN G Y, et al. Experimental study on picosecond pulse laser cleaning of aluminun alloy[J]. Applied Laser, 2018, 38(2): 256-262(in Chinese).

    [15] [15] VEREECKE G, HEYNS M M, ROHR E. Influence of beam incidence angle on dry laser cleaning of surface particles[J]. Applied Surface Science, 2000, 157(1): 67-73.

    [16] [16] JIN S, WANG J X, YUAN X D, et al. Laser paint removal technology for aircraft metal skin and composite materials[J]. High Energy Beam Machining, 2018, 61(17): 63-70(in Chinese).

    [17] [17] CHEN Y M, ZHOU L Z, YAN F, et al. Mechanism and quality evaluation of laser cleaning of aluminum alloy[J]. Chinese Journal of Lasers, 2017, 44(12): 1202005(in Chinese).

    [18] [18] TONG Y Q, ZHANG Y K, YAO H B, et al. Plasma spectral analysis of laser cleaning process in air[J]. Spectroscopy and Spectral Analysis, 2011, 31(9): 2542-2545(in Chinese).

    [19] [19] LEE J M, WATKINS K G. Removal of small particles on silicon wafer by laser-induced airborne plasma shock waves[J]. Journal of Applied Physics, 2001, 89(11): 6496-6500.

    [20] [20] TIAN W Ch, JIA J Y, CHEN G Y. Digital density in hamaker micro continuum medium principle and hamaker constant[J].Chinese Journal of Computational Physics, 2006, 23(3): 366-370(in Chinese).

    [21] [21] WANG H P, JING J, BLUM L. Interaction energy between spherical colloidal particles——the improvement on Derjaguin method[J]. Chemical Journal of Chinese Universities, 1994,15(10):1538-1542(in Chinese).

    Tools

    Get Citation

    Copy Citation Text

    GUO Naihao, WANG Jingxuan, XIANG Xia. Study on laser cleaning process of sol-gel film optical surface[J]. Laser Technology, 2020, 44(2): 156

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Apr. 15, 2019

    Accepted: --

    Published Online: Apr. 4, 2020

    The Author Email:

    DOI:10.7510/jgjs.issn.1001-3806.2020.02.003

    Topics