Novel Projection Lens Design for Large-area PCB Lithography

[2] [2] WANG Feng-tao, LIU Fu-han, KONG Ling-hua. Proximity Lithography in Sub-10 Micron Circuitry for Packaging Substrate [J]. IEEE Transaction on Advanced Packaging, 2010, 33(4): 876-882.

[3] [3] Jain K. A Large-Area High-Throughput High-Resolution Projection Imaging System: US, 5285236 [P]. 1994-08.

[8] [8] Joseph M Geary. Introduction to Lens Design: With Practical ZEMAX Examples [M]. Willmann-Bell, Inc, 2002: 365-372.

[9] [9] Plummer J D. Silicon VLSI Technology Fundamentals, Practice and Modeling [M]. Prentice Hall, 2003: 688-742.

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DENG Yafei, ZHOU Jinyun, LEI Liang, RAN Zuo, ZHOU Yamei. Novel Projection Lens Design for Large-area PCB Lithography[J]. Opto-Electronic Engineering, 2013, 40(2): 100

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Paper Information

Category:

Received: Sep. 24, 2012

Accepted: --

Published Online: Mar. 5, 2013

The Author Email: Yafei DENG (qqv100125@126.com)

DOI:10.3969/j.issn.1003-501x.2013.02.016

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology