Opto-Electronic Engineering, Volume. 40, Issue 2, 100(2013)
Novel Projection Lens Design for Large-area PCB Lithography
For large-area and high-density Printed Circuit Board (PCB) lithography, we use ZEMAX optical design software to design a kind of lithographic projection lens with 8 optics element. Symmetrical double Gaussian structure is applied in the lens, the magnification is -1, and numerical aperture NA = 0.06. It can exposure a area of Φ = 80 mm at a time, and have better than 7 μm resolution and 120 μm focus shift.The result of tolerance analysis show that the tightest tolerance is part of the element tilts, which should be lower than 0.017 °. We use the Monte Carlo method to simulate fabricating and assembling 50 group of lens. The results show 90% of the lens MTF > 0.58 at spatial frequency 72 line/mm, which can ensure more than 90% yield when they are fabricated and assembled.
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DENG Yafei, ZHOU Jinyun, LEI Liang, RAN Zuo, ZHOU Yamei. Novel Projection Lens Design for Large-area PCB Lithography[J]. Opto-Electronic Engineering, 2013, 40(2): 100
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Received: Sep. 24, 2012
Accepted: --
Published Online: Mar. 5, 2013
The Author Email: Yafei DENG (qqv100125@126.com)