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Laser Technology, Volume. 44, Issue 3, 343(2020)

Excimer laser control system based on LabVIEW

PAN Bingbing1,2, LIANG Xu1、*, PAN Ning1, LIN Ying1, XU Jian3, and FANG Xiaodong1,2
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  • 1[in Chinese]
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  • 3[in Chinese]
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    PAN Bingbing, LIANG Xu, PAN Ning, LIN Ying, XU Jian, FANG Xiaodong. Excimer laser control system based on LabVIEW[J]. Laser Technology, 2020, 44(3): 343

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    Received: May. 10, 2019

    Accepted: --

    Published Online: Jun. 8, 2020

    The Author Email: LIANG Xu (liangxu@aiofm.ac.cn)

    DOI:10.7510/jgjs.issn.1001-3806.2020.03.013

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology