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Journal of Infrared and Millimeter Waves, Volume. 24, Issue 6, 409(2005)

BIMATERIAL MICRO-CANTILEVER UNCOOLED INFRARED IMAGING SYSTEM--DESIGN AND FABRICATION OF MICRO-CANTILEVER ARRAY

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]1
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    [1] [1] Antoni Rogalski. Infrared detectors:status and trends[J]. Progress in Quantum Electronics,2003,27:59-210.

    [2] [2] Zhao Y. Optomechanical uncooled infrared imaging system [D]. Dissertation of UC, Berkeley, 2002.

    [3] [3] Mao, M, Perazzo, T, Kwon, O, et al. Direct-view uncooled micro-optomechanical infrared camera [C]. In MEMS '99. Twelfth IEEE International Conference USA:orlando, Florida, 1999,100-105.

    [4] [4] Senesaca L R, Corbeila J L, Rajicab B S, et al. IR imaging using uncooled microcantilever detectors [J]. Ultramicroscopy, 2003,97:451-458.

    [5] [5] Zhao Y, Mao M, Horowitz R, et al. Optomechanical uncooled infrared imaging system: Design, microfabrication, and performance [J]. J. of MEMS., 2002,11(2):136-146.

    [6] [6] DUAN Zhi-Hui, ZHANG Qing-Chuan, Wu Xiao-Ping, et al. Uncooled optically readable bimaterial micro-cantilever infrared imaging device [J]. Chinese Physics Letters,2003,20(12):2130-2132.

    [8] [8] Lai J, Perazzo T, Shi Z, et al. Optimization and Performance of High-resolution Micro-optomechanical Thermal Sensors [J]. Sensors and Actuators A,1997,58:113-119.

    [9] [9] Biao Li. Design and simulation of an uncooled double-cantilever microbolometer with the potential for ～mK NETD [J]. Sensors and Actuators A,2004,112:351-359.

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    [1] Su Bo, Duan Guoteng, Zhang Cunlin. Research of Terahertz Wave Detection System Based on Bi-Material Micro-Cantilever Arrays[J]. Chinese Journal of Lasers, 2011, 38(s1): 111002

    [2] Mao Liang, Shi Haitao, Cheng Teng, Ou Yi, Chen Dapeng, Zhang Qingchuan. Design Optimization and Fabrication of the Focal Plane Array Reflector[J]. Acta Optica Sinica, 2013, 33(1): 111001

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. BIMATERIAL MICRO-CANTILEVER UNCOOLED INFRARED IMAGING SYSTEM--DESIGN AND FABRICATION OF MICRO-CANTILEVER ARRAY[J]. Journal of Infrared and Millimeter Waves, 2005, 24(6): 409

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    Paper Information

    Received: Nov. 15, 2004

    Accepted: --

    Published Online: Jun. 12, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology