Journal of Infrared and Millimeter Waves, Volume. 24, Issue 6, 409(2005)

BIMATERIAL MICRO-CANTILEVER UNCOOLED INFRARED IMAGING SYSTEM--DESIGN AND FABRICATION OF MICRO-CANTILEVER ARRAY

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]1
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  • 1[in Chinese]
  • 2[in Chinese]
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    The design and fabrication of one-layer bimaterial micro-cantilever array made of silicon nitride(SiNx) and gold(Au) without Si substrate for uncooled optical readout infrared(IR) imaging system were presented.One-layer structure simplifies the fabrication process.IR thermal images can be obtained when the cantilever array is placed in the atmosphere.The experimental results with the micro-cantilever array of 140×98 elements and 12-bit CCD indicate that the objects at the temperature of higher than 120℃ can be detected and the noise-equivalent temperature difference(NETD) of the device is ~7K.The experimental results are well accordant with the thermomechanical design of microcantilever array.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. BIMATERIAL MICRO-CANTILEVER UNCOOLED INFRARED IMAGING SYSTEM--DESIGN AND FABRICATION OF MICRO-CANTILEVER ARRAY[J]. Journal of Infrared and Millimeter Waves, 2005, 24(6): 409

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    Paper Information

    Received: Nov. 15, 2004

    Accepted: --

    Published Online: Jun. 12, 2006

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