Chinese Optics Letters, Volume. 9, Issue 5, 053101(2011)
Accurate analysis of ellipsometric data for thick transparent f ilms
[1] [1] J. Hilfiker, N. Singh, T. Tiwald, D. Convey, S. Smith, J. Baker, and H. Tompkins, Thin Solid Films 516, 7979 (2008).
[2] [2] R. Shrestha, D. Yang, and E. Irene, Thin Solid Films 500, 252 (2006).
[3] [3] C. Walsh and E. Franses, Thin Solid Films 347, 167 (1999).
[4] [4] J. Rivory, Thin Solid Films 313, 333 (1998).
[5] [5] S. Colard and M. Mihailovic, Thin Solid Films 336, 362 (1998).
[6] [6] I. An, J. Nanophotonics 2, 021905 (2008).
[7] [7] M. Vinodh, L. Jeurgens, and E. Mittemijer, J. Appl. Phys. 100, 044903 (2006).
[8] [8] M. Camacho-Lopez, C. Sanchez-Perez, A. Esparza-Garcia, E. Ghibaudo, S. Rodil, S. Muhl, and L. Escobar-Alarcon, Proc. SPIE 5622, 545 (2004).
[9] [9] H. McKay, R. Feenstra, T. Schmidtling, U. Pohl, and J. Geisz, J. Vac. Sci. Technol. B 19, 1644 (2001).
[10] [10] S. Guo, G. Gustafsson, O. Hagel, and H. Arwin, Appl. Opt. 35, 1693 (1996).
[11] [11] S. Bosch, J. P′erez, and A. Canillas, Appl. Opt. 37, 1177 (1998).
[12] [12] J. Campmany, E. Bertran, A. Canillas, J. And′ujar, and J. Costa, J. Opt. Soc. Am. A 10, 713 (1993).
[13] [13] V. Odarich, J. Opt. Technol. 75, 132 (2008).
[14] [14] M. Sheng, Y. Wu, S. Feng, Y. Chen, Y. Zheng, and L. Chen, Appl. Opt. 46, 7049 (2007).
[15] [15] M. Klein, Optics (Wiley, New York, 1970).
[16] [16] R. Azzam and N. Bashara, Ellipsometry and polarized light (Elsevier, Amsterdam, 1985).
[17] [17] M. Yonghong, C. She, and J. Gang, Chin. Opt. Lett. 8, (Sup) 114 (2010).
[19] [19] F. S. Levin, An introduction to quantum theory (Cambridge University Press, Cambridge, New York, 2002) chap.7.
[20] [20] L. Chen, X. Feng, Y. Su, H. Ma, and Y. Qian, Appl. Opt. 33, 1299 (1994).
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Yuan Zhao, Mingyu Sheng, Yuxiang Zheng, Liangyao Chen, "Accurate analysis of ellipsometric data for thick transparent f ilms," Chin. Opt. Lett. 9, 053101 (2011)
Category: Thin films
Received: Sep. 26, 2010
Accepted: Dec. 10, 2010
Published Online: Apr. 22, 2011
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