Chinese Optics Letters, Volume. 9, Issue 5, 053101(2011)

Accurate analysis of ellipsometric data for thick transparent f ilms

Yuan Zhao1,2, Mingyu Sheng1,3, Yuxiang Zheng1, and Liangyao Chen1
Author Affiliations
  • 1Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
  • 2Department of Optical Electronics Information Engineering, Shanghai Second Polytechnic University, Shanghai 201209, China
  • 3Department of Electronics Information Engineering, Shanghai Business School, Shanghai 200235, China
  • show less
    References(20)

    [1] [1] J. Hilfiker, N. Singh, T. Tiwald, D. Convey, S. Smith, J. Baker, and H. Tompkins, Thin Solid Films 516, 7979 (2008).

    [2] [2] R. Shrestha, D. Yang, and E. Irene, Thin Solid Films 500, 252 (2006).

    [3] [3] C. Walsh and E. Franses, Thin Solid Films 347, 167 (1999).

    [4] [4] J. Rivory, Thin Solid Films 313, 333 (1998).

    [5] [5] S. Colard and M. Mihailovic, Thin Solid Films 336, 362 (1998).

    [6] [6] I. An, J. Nanophotonics 2, 021905 (2008).

    [7] [7] M. Vinodh, L. Jeurgens, and E. Mittemijer, J. Appl. Phys. 100, 044903 (2006).

    [8] [8] M. Camacho-Lopez, C. Sanchez-Perez, A. Esparza-Garcia, E. Ghibaudo, S. Rodil, S. Muhl, and L. Escobar-Alarcon, Proc. SPIE 5622, 545 (2004).

    [9] [9] H. McKay, R. Feenstra, T. Schmidtling, U. Pohl, and J. Geisz, J. Vac. Sci. Technol. B 19, 1644 (2001).

    [10] [10] S. Guo, G. Gustafsson, O. Hagel, and H. Arwin, Appl. Opt. 35, 1693 (1996).

    [11] [11] S. Bosch, J. P′erez, and A. Canillas, Appl. Opt. 37, 1177 (1998).

    [12] [12] J. Campmany, E. Bertran, A. Canillas, J. And′ujar, and J. Costa, J. Opt. Soc. Am. A 10, 713 (1993).

    [13] [13] V. Odarich, J. Opt. Technol. 75, 132 (2008).

    [14] [14] M. Sheng, Y. Wu, S. Feng, Y. Chen, Y. Zheng, and L. Chen, Appl. Opt. 46, 7049 (2007).

    [15] [15] M. Klein, Optics (Wiley, New York, 1970).

    [16] [16] R. Azzam and N. Bashara, Ellipsometry and polarized light (Elsevier, Amsterdam, 1985).

    [17] [17] M. Yonghong, C. She, and J. Gang, Chin. Opt. Lett. 8, (Sup) 114 (2010).

    [19] [19] F. S. Levin, An introduction to quantum theory (Cambridge University Press, Cambridge, New York, 2002) chap.7.

    [20] [20] L. Chen, X. Feng, Y. Su, H. Ma, and Y. Qian, Appl. Opt. 33, 1299 (1994).

    Cited By
    Tools

    Get Citation

    Copy Citation Text

    Yuan Zhao, Mingyu Sheng, Yuxiang Zheng, Liangyao Chen, "Accurate analysis of ellipsometric data for thick transparent f ilms," Chin. Opt. Lett. 9, 053101 (2011)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Thin films

    Received: Sep. 26, 2010

    Accepted: Dec. 10, 2010

    Published Online: Apr. 22, 2011

    The Author Email:

    DOI:10.3788/COL201109.053101

    Topics