Nanosecond laser-induced controllable periodical surface structures on silicon

Lei Chen; Zelin Liu; Chuan Guo; Tongcheng Yu; Minsun Chen; Zhongjie Xu; Hao Liu; Guomin Zhao; Kai Han

doi:10.3788/COL202220.013802

Chinese Optics Letters, Volume. 20, Issue 1, 013802(2022)

Nanosecond laser-induced controllable periodical surface structures on silicon

Lei Chen¹, Zelin Liu¹, Chuan Guo^1,2、*, Tongcheng Yu^1,2, Minsun Chen^1,2, Zhongjie Xu^1,2, Hao Liu^1,2, Guomin Zhao^1,2, and Kai Han^1,3、**

Author Affiliations

¹College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha 410073, China

²Hunan Provincial Key Laboratory of High Energy Laser Technology, Changsha 410073, China

³State Key Laboratory of Pulsed Power Laser Technology, Hefei 230037, China

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Lei Chen, Zelin Liu, Chuan Guo, Tongcheng Yu, Minsun Chen, Zhongjie Xu, Hao Liu, Guomin Zhao, Kai Han, "Nanosecond laser-induced controllable periodical surface structures on silicon," Chin. Opt. Lett. 20, 013802 (2022)

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Paper Information

Category: Light-matter Interaction

Received: Aug. 25, 2021

Accepted: Oct. 21, 2021

Posted: Oct. 22, 2021

Published Online: Nov. 17, 2021

The Author Email: Chuan Guo (guochuan12@mails.ucas.ac.cn), Kai Han (hankai0071@nudt.edu.cn)

DOI:10.3788/COL202220.013802

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology