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Acta Optica Sinica, Volume. 34, Issue 5, 531001(2014)

Simulation Model of Surface Carbon Deposition Contamination Under Extreme Ultraviolet Radiation

Wang Xun1,2、*, Jin Chunshui1, Kuang Shangqi1, Yu Bo1, and Jin Fangyuan1,2
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    Wang Xun, Jin Chunshui, Kuang Shangqi, Yu Bo, Jin Fangyuan. Simulation Model of Surface Carbon Deposition Contamination Under Extreme Ultraviolet Radiation[J]. Acta Optica Sinica, 2014, 34(5): 531001

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    Paper Information

    Category: Thin Films

    Received: Dec. 2, 2013

    Accepted: --

    Published Online: May. 15, 2014

    The Author Email: Wang Xun (gocga@126.com)

    DOI:10.3788/aos201434.0531001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology