[1] [1] Li Zhihua, Fan Jingqin, Li Punian et al.. Effect of laser energy accumulation on surface periodic structures induced by femtosecong laser［J］. Chinese J. Lasers, 2010, 37(1): 68～73

[2] [2] Guo Xiaodong, Li Ruxin, Yu Bingkun et al.. Femtosecond laser pulses induced nanostructures on ZnO in different ablation conditions［J］. Acta Optica Sinica, 2008, 28(5): 1017～1020

[3] [3] T. H. Her, R. J. Finlay, C. Wu et al.. Microstructuring of silicon with femtosecond laser pulses［J］. Appl. Phys. Lett., 1998, 73(12): 1673～1675

[4] [4] M. A. Sheehy, L. Winston, J. E. Carey et al.. Role of the background gas in the morphology and optical properties of laser microstructured properties of laser-microstructured silicon［J］. Chemistry of Materials, 2005, 17(14): 3582～3586

[5] [5] M. A. Sheehy, B. R. Tull, C. M. Friend et al.. Chalcogen doping of silicon via intense femtosecond-laser irradiation［J］. Materials Science & Engineering B, 2007, 137(1-3): 289～294

[6] [6] C. H. Crouch, J. E. Carey, M. Shen et al.. Infrared absorption by sulfur-doped silicon formed by femtosecond laser irradiation［J］. Appl. Phys. A, 2004, 79(7): 1635～1641

[7] [7] C. Wu, C. H. Crouch, L. Zhao et al.. Near-unity below-band-gap absorption by microstructured silicon［J］. Appl. Phys. Lett., 2001, 78(13): 1850～1853

[8] [8] V. V. Iyengar, B. K. Nayak, M. C. Gupta. Optical properties of silicon light trapping structures for photovoltaics［J］. Solor Energy Materials & Solor Cells, 2010, 94(12): 2251～2257

[9] [9] Y. Wang, S. Liu, L. Zhao et al.. Infrared light absorption of silver film coated on the surface of femtosecond laser［J］. Mater. Lett., 2009, 63(30): 2718～2720

[10] [10] Wang Yinling, Xu Xueqing, Xu Gang et al.. Development and progress of transparent conducting ZAO thin flims［J］. Materials Review, 2008, 22(z2): 297～300

[11] [11] He Jingjing, Wu Xuemei, Zhuge Lanjian et al.. Development of textured ZnOAl transparent conductive oxide thin films［J］. Micronanoelectronic Technology, 2010, 47(5): 290～296

[12] [12] Li Ping, Wang Yu, Feng Guojin et al.. Study of silicon micro-structuring using ultra-short laser pulses［J］. Chinese J. Lasers, 2006, 33(12): 1688～1691

[13] [13] Yuan Chunhua, Li Xiaohong, Tang Duochang et al.. Nanosecond laser pules-induced surface microstructures on silicon［J］. High Power Laser and Particle Beams, 2010, 22(2): 393～396

[14] [14] Hou Dayin, Tang Hui. Preparation and photoelectric properties of nano-AZO film［J］. Journal of Textile Research, 2009, 30(10): 75～79

[15] [15] S. H. Hwang, C. B. Park. The electrical and optical properties of Al-doped ZnO films sputtered in an ArH2 gas radio frequency magnetron sputtering system［J］. Transactions on Electrical and Electronic Materials, 2001, 11(2): 81～84

[16] [16] Jiao Fei, Liao Cheng, Han Junfeng et al.. Prepareation of large area Al-ZnO thin film by DC magnetron sputtering［J］. Spectroscopy and Spectral Analysis, 2009, 29(3): 698～701

[17] [17] F. H. Wang, H. P. Chang, C. C. Tseng et al.. Influence of hydrogen plasma treatment on Al-doped ZnO thin films for amorphous silicon thin film solar cells［J］. Current Appl. Phys., 2011, 11(1): 1～5

[18] [18] O. Kluth, B. Rech, L. Houben et al.. Texture etched ZnO-Al coated glass substrates for silicon based thin film solar cells［J］. Thin Solid Films, 1999, 351(1-2): 247～253

[19] [19] Sun Chao, Chen Meng, Pei Zhiliang et al.. Microsturcture and properties of transparent conductive oxide ZnOAl(ZAO) thin films［J］. Chinese Jounal of Materials Research, 2002, 6(2): 113～120

[20] [20] J. J. Ding, S. Y. Ma, H. X. Chen et al.. Influence of Al-doping on the structure and optical properties of ZnO films［J］. Physica B, 2009, 404(16): 2439～2443

[21] [21] H. Shen, H. Zhang, L. Lu et al.. Preparation and properties of AZO thin films on different substrates［J］. Progress in Nature Science: Materials International, 2010, 20(1): 44～48