[1] LI J X, ZHANG S J, DENG J et al. Development of a multifunction piezoelectric microscopic observation system based on visual feedback[J]. IEEE Transactions on Industrial Electronics, 71, 11156-11166(2024).

[2] ZHANG S J, ZHAO H F, MA X F et al. A 3-DOF piezoelectric micromanipulator based on symmetric and antisymmetric bending of a cross-shaped beam[J]. IEEE Transactions on Industrial Electronics, 70, 8264-8275(2023).

[3] DU H H, SZE YIP W et al. Development and assessment of a novel two-degree-of-freedom vibration generator for generating and hiding optical information[J]. Mechanical Systems and Signal Processing, 181, 109470(2022).

[4] 张旭, 赖磊捷, 李朋志. 电磁驱动柔顺微定位平台闭环频域逆迭代学习控制[J]. 光学 精密工程, 29, 2149-2157(2021).

     ZHANG X, LAI L J, LI P ZH et al. Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform[J]. Opt. Precision Eng., 29, 2149-2157(2021).

[5] SHIRVANI H K, HOSSEINKHANI Y, ERKORKMAZ K. Suppression of harmonic positioning errors in ball-screw drives using Adaptive Feedforward Cancellation[J]. Precision Engineering, 68, 235-255(2021).

[6] HSIEH C L, LIU C S. Design of a voice coil motor actuator with L-shape coils for optical zooming smartphone cameras[J]. IEEE Access, 8, 20884-20891(2020).

[7] ZHEN R, JIANG L, LI H et al. Modular bioinspired hand with multijoint rigid-soft finger possessing proprioception[J]. Soft Robot, 10, 380-394(2023).

[8] MA SH K, YANG Y L, WU G H et al. Purely central piezoelectric stick-slip rotary stage without driving redundancy[J]. Robot, 46, 257-265(2024).

     马世坤, 杨依领, 吴高华. 无驱动冗余的纯中心压电黏滑旋转台[J]. 机器人, 46, 257-265(2024).

[9] 徐斯强, 朱晓博, 刘品宽. 粘滑式压电驱动平台的复合控制[J]. 光学 精密工程, 27, 2571-2580(2019).

     XU S Q, ZHU X B, LIU P K. Composite control of piezo-actuated stick-slip devices[J]. Opt. Precision Eng., 27, 2571-2580(2019).

[10] WU Y X, YANG Y L, LI G P et al. A non-redundant piezoelectric center-rotation platform with a single-layer structure and a large working range[J]. Mechatronics, 88, 102911(2022).

[11] MA X F, LIU J K, DENG J et al. A simplified inchworm rotary piezoelectric actuator inspired by finger twist： design， modeling， and experimental evaluation[J]. IEEE Transactions on Industrial Electronics, 70, 12660-12669(2023).

[12] WU G H, YANG Y L, CUI Y G et al. A novel macro-fiber-composite stick-slip actuator with large single-step displacements[J]. Precision Engineering, 87, 79-96(2024).

[13] LI X, WANG X Y, SUN W X et al. A compact 2-DOF piezo-driven positioning stage designed by using the parasitic motion of flexure hinge mechanism[J]. Smart Material Structures, 29(2020).

[14] HAN W W, SHAO S B, ZHANG S W et al. Design and modeling of decoupled miniature fast steering mirror with ultrahigh precision[J]. Mechanical Systems and Signal Processing, 167, 108521(2022).

[15] KIM J, KANG D, KIM K R et al. Experimental validation of ultra-precision nanopositioning system[J]. IEEE Access, 9, 88931-88941(2021).

[16] JIANG J G, TAN Q Y, HE T H et al. Safety analysis， design and evaluation of 2-DOF parallel lifting actuator on stereo parking robot[J]. Actuators, 11, 181(2022).

[17] WU T, YANG Y L, WU G H et al. Two-DOF piezoelectric stick-slip positioning platform with large strokes and no coupling[J]. Opt. Precision Eng., 32, 62-72(2024).

     吴彤, 杨依领, 吴高华. 二自由度大行程无耦合压电粘滑定位平台[J]. 光学 精密工程, 32, 62-72(2024).

[18] TIAN Y L, HUO Z C, WANG F J et al. A novel friction-actuated 2-DOF high precision positioning stage with hybrid decoupling structure[J]. Mechanism and Machine Theory, 167, 104511(2022).

[19] YU H P, LIU Y X, DENG J et al. A collaborative excitation method for piezoelectric stick-slip actuator to eliminate rollback and generate precise smooth motion[J]. Mechanical Systems and Signal Processing, 170, 108815(2022).

[20] HUO Z C, TIAN Y L, WANG F J et al. A dual-driven high precision rotary platform based on stick-slip principle[J]. IEEE/ASME Transactions on Mechatronics, 27, 3053-3064(2022).