Optics and Precision Engineering, Volume. 33, Issue 3, 427(2025)
Three-degree-of-freedom parallel piezoelectric stick-slip platform
In addressing the performance requirements associated with macro-stroke applications, such as high precision, substantial load capacity, and multi-degree-of-freedom functionality for tasks involving cell puncture, micro-operation, and micro-assembly, a novel three-degree-of-freedom parallel stick-slip driving platform utilizing piezoelectric compliant mechanisms was proposed. The integration of macro fiber composite with the arch driving mechanism constructed a driving unit that facilitates stick-slip actuation, enabling large-scale, high-precision motion of the parallel platform. Furthermore, the implementation of cylindrical support significantly enhanced the platform's load capacity, while universal bearings mitigate non-driven friction, thereby improving overall motion performance. The finite element method was utilized to establish the static model of the compliant arch driving unit, followed by simulations and analysis of output displacement and natural frequency. An experimental test system was subsequently developed to validate the output performance of the platform. Experimental results indicate that the piezoelectric stick-slip platform, operating in stepping mode, achieves maximum single-step translation displacements of 294.7 μm and 304.5 μm along the X and Y axes, respectively, as well as a maximum single-step rotation angle of 9.96 mrad around the Z axis, with a maximum vertical load capacity of 110 N. In scanning mode, the displacement resolutions for translation and rotation are recorded at 6 nm and 0.28 μrad, respectively. Thus, the designed parallel piezoelectric stick-slip platform effectively satisfies the performance criteria required for precision micromanipulation tasks.
Get Citation
Copy Citation Text
Lingwei MENG, Yiling YANG, Gaohua WU, Yuguo CUI, Yanding WEI. Three-degree-of-freedom parallel piezoelectric stick-slip platform[J]. Optics and Precision Engineering, 2025, 33(3): 427
Category:
Received: Oct. 14, 2024
Accepted: --
Published Online: Apr. 30, 2025
The Author Email: Yiling YANG (yangyiling@nbu.edu.cn)