Optics and Precision Engineering, Volume. 20, Issue 2, 344(2012)
Surface shape control of electrostatic stretching membrane mirror by multi-electrodes
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ZHANG Peng, JIN Guang, ZHANG Yuan, ZHONG Xing. Surface shape control of electrostatic stretching membrane mirror by multi-electrodes[J]. Optics and Precision Engineering, 2012, 20(2): 344
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Received: May. 20, 2011
Accepted: --
Published Online: Mar. 6, 2012
The Author Email: ZHANG Peng (zpjg1021.student@sina.com)
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