Opto-Electronic Engineering, Volume. 35, Issue 6, 23(2008)

Ion Energy and Energy Distribution of the Broad Beam Cool Cathode Ion Source

XU Jun-qi*, MI Qian, HANG Ling-xia, YAN Yi-xin, and DONG Wang-ni
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    XU Jun-qi, MI Qian, HANG Ling-xia, YAN Yi-xin, DONG Wang-ni. Ion Energy and Energy Distribution of the Broad Beam Cool Cathode Ion Source[J]. Opto-Electronic Engineering, 2008, 35(6): 23

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    Paper Information

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    Received: Oct. 23, 2007

    Accepted: --

    Published Online: Mar. 1, 2010

    The Author Email: Jun-qi XU (jqxu2210@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

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