Acta Optica Sinica, Volume. 31, Issue 10, 1016001(2011)

Effect of Substrate Temperature on Crystallization and Luminescence Properties of Nonpolar ZnO Films

Jia Tingting1,2、*, Zhou Shengming1, Lin Hui1, Teng Hao1, Hou Xiaorui1,2, Wang Jianfeng3, and Xu Ke3
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  • 1[in Chinese]
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  • 3[in Chinese]
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    References(12)

    [4] [4] T. Makino, A. Ohtomo, C. H. Chia et al.. Internal electric field effect on luminescence properties of ZnO/(Mg,Zn)O quantum wells [J]. Physica E: Low-Dimensional Systems and Nanostructures, 2004, 21(2-4): 671~675

    [5] [5] J. Chen, H. Deng, N. Li et al.. Realization of nonpolar a-plane ZnO films on r-plane sapphire substrates using a simple single-source chemical vapor deposition [J]. Mate. Lett., 2011, 65(4): 716~718

    [6] [6] T. Moriyama, S. Fujita. Growth behavior of nonpolar ZnO on M-plane and R-plane sapphire by metalorganic vapor phase epitaxy [J]. J. J. Appl. Phys., 2005, 44(11): 7919~7921

    [7] [7] S. Zhou, J. Zhou, T. Huang et al.. Nonpolar a-plane ZnO films fabricated on (302)-LiAlO2 by pulsed laser deposition [J]. J. Crys. Growth, 2007, 303(2): 510~514

    [8] [8] H. Lin, S. Zhou, J. Zhou et al.. Structural and optical properties of a-plane ZnO thin films synthesized on γ-LiAlO2 (302) substrates by low pressure metal-organic chemical vapor deposition [J]. Thin Solid Films, 2008, 516(18): 6079

    [9] [9] C. R. Gorla, N. W. Emanetoglu, S. Liang et al.. Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (0112) sapphire by metalorganic chemical vapor deposition [J]. J. Appl. Phys., 1999, 85(5): 2595~2602

    [11] [11] M. C. Chou, L. Chang, H. Chung et al.. Growth and characterization of nonpolar ZnO (1010) epitaxial film on γ-LiAlO2 substrate by chemical vapor deposition [J]. J. Crys. Growth, 2007, 308(2): 412~416

    [12] [12] T. Matsumoto, H. Kato, K. Mayamoto et al.. Correlation between grain size and optical properties in zinc oxide thin films [J]. Appl. Phys. Lett., 2002, 81(7): 1231~1233

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    Jia Tingting, Zhou Shengming, Lin Hui, Teng Hao, Hou Xiaorui, Wang Jianfeng, Xu Ke. Effect of Substrate Temperature on Crystallization and Luminescence Properties of Nonpolar ZnO Films[J]. Acta Optica Sinica, 2011, 31(10): 1016001

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    Paper Information

    Category: Materials

    Received: Apr. 15, 2011

    Accepted: --

    Published Online: Sep. 16, 2011

    The Author Email: Tingting Jia (jiating@siom.ac.cn)

    DOI:10.3788/aos201131.1016001

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