[1] [1] R. Matero, M. Ritala, M. Leskel et al.. Atomic layer deposition of ZrO2 thin films using a new alkoxide precursor [J]. Journal of Non-Crystalline Solids, 2002, 303(1):24～28

[2] [2] Shao Shuying, Fan Zhengxiu, Shao Jianda et al.. Evolutions of residual stress and microstructure in ZrO2 thin films deposited at different temperatures and rates [J]. Thin Solid Films, 2003, 445:59～62

[3] [3] Dongping Zhang, Meiqiong Zhan, Ming Fang et al.. Influence of deposition rate on the properties of ZrO2 thin films prepared in electron beam evaporation method [J]. Chin. Opt. Lett., 2004, 2(6):364～366

[4] [4] M. A. Fardad, M. Fallahi. Sol-gel multimode interference power splitters [J]. IEEE Photon. Technol. Lett., 1999, 11(6):697～699

[5] [5] J. P. Holgado, M. Perez Sanchez, F. Yubero et al.. Corrosion resistant ZrO2 thin films prepared at room temperature by ion beam induced chemical vapor deposition [J]. Surface & Coatings Technology, 2002, 151-152:449～453

[6] [6] Thomas Koch, Paul Ziemann. Effects of ion-beam-assisted deposition on the growth of zirconia films [J]. Thin Solid Films, 1997, 303(1-2):122～127

[7] [7] Tian Guanglei, Shen Yanming, Shen Jian et al.. Influence of technological conditions of deposition process on microstructure of thin films [J]. Chinese J. Lasers, 2006, 33(5):673～678

[8] [8] Li Chengren, Song Shide, Zhou Songqiang et al.. Investigation of laser annealing on Yb-Er co-doped Al2O3 films [J]. Acta Optica Sinica, 2007, 27(7):1322～1326

[9] [9] Dongping Zhang, Jianda Shao, Dawei Zhang et al.. Employing oxygen-plasma posttreatment to improve the laser-induced damage threshold of ZrO2 films prepared by the electron-beam evaporation method [J]. Opt. Lett., 2004, 29(24):2870～2872

[10] [10] Hou Haihong, Hong Ruijin, Zhang Dongping et al.. Total integrated scatterometer for measuring the microroughness of optical thin films [J]. Chinese J. Lasers, 2005, 32(9):1258～1261

[11] [11] Shuhai Fan, Hongbo He, Jianda Shao et al.. Absorption measurement for coatings using surface thermal lesing technique [C]. SPIE, 2005, 5774:531～574

[12] [12] Cui Yun, Zhao Yuanan, Jin Yunxia et al.. Laser damage characteristic of third harmonic separator at 1064 nm [J]. Acta Optica Sinica, 2007, 27(6):1129～1134