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Chinese Journal of Lasers, Volume. 46, Issue 4, 0404005(2019)

Real-Time In-Situ Calibration for Angle Measuring Sensor Based on Autocollimator

Wenying Zhang1,2、*, Haoran Zhu3、*, Meixuan Li1,2, Zexuan Guo1,2, and Ming Guo1,2
Author Affiliations
  • 1 Institute for Interdisciplinary Quantum Information Technology, Jilin Engineering Normal University, Changchun, Jilin 130052, China
  • 2 Jilin Engineering Laboratory for Quantum Information Technology, Changchun, Jilin 130052, China
  • 3 School of Electronics and Information Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (13)
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    Figures & Tables(13)
    Angle measuring sensor

    Fig. 1. Angle measuring sensor

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    Moire fringe pattern

    Fig. 2. Moire fringe pattern

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    Circular grating eccentricity diagram

    Fig. 3. Circular grating eccentricity diagram

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    Installation tilt error diagram

    Fig. 4. Installation tilt error diagram

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    Schematic of grating grid line position deviation

    Fig. 5. Schematic of grating grid line position deviation

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    Positional relationship between readhead and score line

    Fig. 6. Positional relationship between readhead and score line

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    Readhead output schematic

    Fig. 7. Readhead output schematic

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    Calibration device and principle diagram

    Fig. 8. Calibration device and principle diagram

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    System physical map

    Fig. 9. System physical map

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    Original error curve and post-calibration error curve

    Fig. 10. Original error curve and post-calibration error curve

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    Error curves

    Fig. 11. Error curves

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    Repeatability error curves

    Fig. 12. Repeatability error curves

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    Wide range continuous error curve

    Fig. 13. Wide range continuous error curve

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    Wenying Zhang, Haoran Zhu, Meixuan Li, Zexuan Guo, Ming Guo. Real-Time In-Situ Calibration for Angle Measuring Sensor Based on Autocollimator[J]. Chinese Journal of Lasers, 2019, 46(4): 0404005

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    Paper Information

    Category: measurement and metrology

    Received: Nov. 20, 2018

    Accepted: Dec. 29, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0404005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology