Chinese Optics Letters, Volume. 10, Issue s1, S12202(2012)
Fabrication of low loss polymer inverse ridge waveguide using inductively coupled plasma etching
References(20)
[1] [1] K. Iiyama, T. Ishida, Y. Ono, T. Maruyama, and T. Yamagishi, IEEE Photon. Technol. Lett. 23, 275 (2011).
[2] [2] S. Li, Q. Lin, L. Chen, and X. Wu, Chin. Opt. Lett. 9, 081302 (2011).
[3] [3] N. Bamiedakis, J. Beals, R. V. Penty, I. H. White, J. V. Degroot, and T. V. Clapp, IEEE J. Quantum Electron. 45, 415 (2009).
[4] [4] J. Kobayashi, T. Matsuura, Y. Hida, S. Sasaki, and T. Maruno, J. Lightwave Technol. 16, 1024 (1998).
[5] [5] B. L. Booth, J. Lightwave Technol. 7, 1445 (1989).
[6] [6] F. Wang, W. Sun, A. Li, M. Yi, Z. Jiang, and D. Zhang, Chin. Opt. Lett. 3, 568 (2004).
[7] [7] M. H. Ibrahim, N. M. Kassim, A. B. Mohammad, and A. S. M. Supa’at, Optoelectronics and Advanced Materialsrapid Communications 3, 917 (2009).
[8] [8] J. Lin, A. Leven, R. Reyes, Y. K. Chen, and F. S. Choa, J. Vac. Sci. Technol. B 23, 1361 (2005).
[9] [9] Y. Wang, Z. Lin, X. Cheng, C. Zhang, F. Gao, and F. Zhang, Appl. Phys. Lett. 85, 3995 (2004).
[10] [10] C. Chen, D. Zhang, T. Li, D. Zhang, L. Song, and Z. Zhen, J. Nanosci. Nanotechnol. 10, 1947 (2010).
[12] [12] Y. Zhao, D. Zhang, F. Wang, Z. Cui, M. Yi, C. Ma, W. Guo, and S. Liu, Opt. Laser Technol. 36, 657 (2004).
[13] [13] M. A. Uddin, H. P. Chan, C. K. Chow, and Y. C. Chan, J. Electron. Mater. 33, 224 (2004).
[14] [14] B. Schuppert, E. Brose, R. Moosburger, and K. Petermann, J. Vac. Sci. Technol. A 18, 385 (2000).
[15] [15] N. Agarwal, S. Ponoth, J. Plawsky, and P. D. Persans, J. Vac. Sci. Technol. A 20, 1587 (2002).
[16] [16] J. H. Kim, E. J. Kim, H. C. Choi, C. W. Kim, J. H. Cho, Y. W. Lee, B. G. You, S. Y. Yi, H. J. Lee, K. Han, W. H. Jang, T. H. Rhee, J. W. Lee, and S. J. Pearton, Thin Solid Films 341, 192 (1999).
[17] [17] Y. Wang, Z. Lin, C. Zhang, F. Gao, and F. Zhang, IEEE J. Sel. Topics Quantum Electron. 11, 254 (2005).
[18] [18] Y. Zhao, F. Wang, Z. Cui, J. Zheng, H. Zhang, D. Zhang, S. Liu, and M. Yi, Microelectron. J. 35, 605 (2004).
[19] [19] K. Han, J. Kim, and W.-H. Jang, J. Appl. Poly. Sci. 79, 176 (2001).
[20] [20] H. Zhang, C. Ma, Z. Qin, X. Zhang, D. Zhang, S. Liu, and D. Zhang, Acta Opt. Sin. (in Chinese) 27, 690 (2007).
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Xiaoqiang Sun, Kun Zhang, Changming Chen, Xiaodong Li, Fei Wang, Daming Zhang, "Fabrication of low loss polymer inverse ridge waveguide using inductively coupled plasma etching," Chin. Opt. Lett. 10, S12202 (2012)
Paper Information
Category: Optical Design and Fabrication
Received: Aug. 15, 2011
Accepted: Nov. 4, 2011
Published Online: May. 16, 2012
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