Development and Application of Chemical Mechanical Polishing Surface-Pressure Distribution Detection Device Based on Thin-Film Sensors

Chupeng Zhang; Linxiao Yang; Han Xu; Jiazheng Sun; Yingxue Li; Xiao Chen

doi:10.3788/LOP223379

Laser & Optoelectronics Progress, Volume. 60, Issue 15, 1512002(2023)

Development and Application of Chemical Mechanical Polishing Surface-Pressure Distribution Detection Device Based on Thin-Film Sensors

Chupeng Zhang^1、*, Linxiao Yang¹, Han Xu¹, Jiazheng Sun¹, Yingxue Li², and Xiao Chen¹

Author Affiliations

¹College of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, Hubei, China

²College of Locomotive and Rolling Stock Engineering, Dalian Jiaotong University, Dalian 116028, Liaoning, China

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Chupeng Zhang, Linxiao Yang, Han Xu, Jiazheng Sun, Yingxue Li, Xiao Chen. Development and Application of Chemical Mechanical Polishing Surface-Pressure Distribution Detection Device Based on Thin-Film Sensors[J]. Laser & Optoelectronics Progress, 2023, 60(15): 1512002

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Dec. 23, 2022

Accepted: Feb. 14, 2023

Published Online: Aug. 11, 2023

The Author Email: Chupeng Zhang (20181048@hbut.edu.cn)

DOI:10.3788/LOP223379

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology