Fig. 1. Theoretical framework of IC device surface defect detection based on multi-spectral image fusion

Fig. 2. Feature point judgment

Fig. 3. Framework of NSST_VP image fusion principle

Fig. 4. PA-PCNN model neuron structure

Fig. 5. Test bench of visible-infrared image pair acquisition

Fig. 6. Comparison of image registration results

Fig. 7. Comparison of infrared and visible image fusion methods for IC devices

Fig. 8. Loss curves of validation set