[1] Rahman Z, Das A K, Chattopadhyaya S. Microhole drilling through electrochemical processes: a review[J]. Materials and Manufacturing Processes, 33, 1379-1405(2018).

[2] Zheng C L, Zhao K, Shen H et al. Crack behavior in ultrafast laser drilling of thermal barrier coated nickel superalloy[J]. Journal of Materials Processing Technology, 282, 116678(2020). http://www.sciencedirect.com/science/article/pii/S0924013620300923

[3] Li Q, Yang L J, Hou C J et al. Surface ablation properties and morphology evolution of K24 nickel based superalloy with femtosecond laser percussion drilling[J]. Optics and Lasers in Engineering, 114, 22-30(2019). http://www.sciencedirect.com/science/article/pii/S0143816618306158

[4] Liu H D, Zhao W Q, Wang L Z et al. Percussion drilling of deep holes using picosecond ultrashort pulse laser in Ni-based superalloy coated with ceramic thermal barrier coatings[J]. Materials, 13, 3570(2020). http://www.researchgate.net/publication/343638404_Percussion_Drilling_of_Deep_Holes_Using_Picosecond_Ultrashort_Pulse_Laser_in_Ni-Based_Superalloy_Coated_with_Ceramic_Thermal_Barrier_Coatings

[5] He C, Zibner F, Fornaroli C et al. High-precision helical cutting using ultra-short laser pulses[J]. Physics Procedia, 56, 1066-1072(2014). http://www.sciencedirect.com/science/article/pii/S1875389214001643

[6] Li Z Q, Wu Q, Wang J. Ultrashort pulsed laser micromachining of polycrystalline diamond[J]. Advanced Materials Research, 497, 220-224(2012). http://www.scientific.net/AMR.497.220

[7] Jeong B, Lee B, Kim J H et al. Drilling of sub-100 μm hourglass-shaped holes in diamond with femtosecond laser pulses[J]. Quantum Electronics, 50, 201-204(2020). http://iopscience.iop.org/article/10.1070/QEL17097

[8] Narazaki A, Takada H, Yoshitomi D et al. Study on nonthermal-thermal processing boundary in drilling of ceramics using ultrashort pulse laser system with variable parameters over a wide range[J]. Applied Physics A, 126, 1-8(2020). http://link.springer.com/article/10.1007/s00339-020-3410-2

[9] Wang Y Q, Zhang J Z, Liu Y S et al. Effect of femtosecond laser parameters on TiC ceramic micro-hole drilling[J]. Chinese Journal of Lasers, 41, 1003010(2014).

[10] Xing S L, Liu L, Zou G S et al. Effects of femtosecond laser parameters on hole drilling of silica glass[J]. Chinese Journal of Lasers, 42, 0403001(2015).

[11] Lee H M, Choi J H, Moon S J. Determining the machining parameters for femtosecond laser helical drilling of aluminosilicate glass substrate[J]. International Journal of Precision Engineering and Manufacturing, 18, 923-930(2017). http://link.springer.com/article/10.1007/s12541-017-0109-1

[12] Karimelahi S, Abolghasemi L, Herman P R. Rapid micromachining of high aspect ratio holes in fused silica glass by high repetition rate picosecond laser[J]. Applied Physics A, 114, 91-111(2014).

[13] Jiang L, Liu P J, Yan X L et al. High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains[J]. Optics Letters, 37, 2781-2783(2012).

[14] Wlodarczyk K L, Brunton A, Rumsby P et al. Picosecond laser cutting and drilling of thin flex glass[J]. Optics and Lasers in Engineering, 78, 64-74(2016). http://www.sciencedirect.com/science/article/pii/S0143816615002146

[15] Ito Y, Shinomoto R, Nagato K et al. Mechanisms of damage formation in glass in the process of femtosecond laser drilling[J]. Applied Physics A, 124, 1-8(2018). http://link.springer.com/article/10.1007/s00339-018-1607-4

[16] Auerswald J, Ruckli T, Weber P et al[J]. Taper angle correction in cutting of complex micro-mechanical contours with ultra-short pulse laser Journal of Mechanics Engineering and Automation, 2016, 334-338.

[17] Nath A K. Laser drilling of metallic and nonmetallic substrates[J]. Comprehensive Materials Processing, 9, 115-175(2014). http://www.sciencedirect.com/science/article/pii/B9780080965321009043

[18] Gaudfrin K, Lopez J, Mishchik K et al. Fused silica ablation by double femtosecond laser pulses: influence of polarization state[J]. Optics Express, 28, 15189-15206(2020). http://www.researchgate.net/publication/339293668_Fused_silica_ablation_by_double_femtosecond_laser_pulses_influence_of_polarization_state

[19] Nolte S, Momma C, Kamlage G et al. Polarization effects in ultrashort-pulse laser drilling[J]. Applied Physics A, 68, 563-567(1999). http://link.springer.com/article/10.1007%2Fs003390050941

[20] Wang R J, Dong X, Wang K D et al. Polarization effect on hole evolution and periodic microstructures in femtosecond laser drilling of thermal barrier coated superalloys[J]. Applied Surface Science, 537, 148001(2021). http://www.sciencedirect.com/science/article/pii/S0169433220327586

[21] Cho J H, Na S J. Theoretical analysis of keyhole dynamics in polarized laser drilling[J]. Journal of Physics D: Applied Physics, 40, 7638-7647(2007). http://adsabs.harvard.edu/abs/2007JPhD...40.7638C

[22] Moreno I, Paez G, Strojnik M. Polarization transforming properties of Dove prisms[J]. Optics Communications, 220, 257-268(2003). http://www.sciencedirect.com/science/article/pii/S0030401803014238