Opto-Electronic Engineering, Volume. 30, Issue 4, 34(2003)

Measurement of micro-displacement by means of phase shift interferometry with spatial domain sampling

[in Chinese]
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    References(11)

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    [8] [8] KEMAO Q, WU Xiaoping, ASUNDI A. Grating-based real-time polarization phase-shifting interferomentry: error analysis[J]. Appl. Opt, 2002, 41(13): 2448-2453.

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    [in Chinese]. Measurement of micro-displacement by means of phase shift interferometry with spatial domain sampling[J]. Opto-Electronic Engineering, 2003, 30(4): 34

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    Paper Information

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    Received: May. 5, 2003

    Accepted: --

    Published Online: Nov. 14, 2007

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