Chinese Journal of Lasers, Volume. 41, Issue 3, 305002(2014)

Torsion-Sensitive Micro-Electro Mechanical Systems Accelerometer Sensor Based on Optical Fiber Detection Technology

Zhong Shaolong1、*, Long Liang1,2, Li Ming3, and Wu Yaming1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(12)

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    [2] [2] Wei Zhonghan, Sheng Xiaoxia, Liu Binghong, et al.. Spectroscopic sensing system for colored solution concentration based on metallic hollow fiber[J]. Acta Optica Sinica, 2013, 33(7): 0706001.

    [3] [3] O S Wolfbeis. Fiber-optic chemical sensors and biosensors[J]. Anal Chem, 2008, 80(12): 4269-4283.

    [4] [4] An Yang, Feng Hao, Zhang Jingchuan, et al.. Phase sensitive optical time domin reflectometer based on two-beam interference[J]. Acta Optica Sinica, 2013, 33(7): 0706005.

    [5] [5] Zheng Nina, Xie Pinhua, Ling Liuyi, et al.. Detection of atmospheric SO2 and O3 using optical fiber coupling long-path differential optical absorption spectroscopy system with UV light emitting diodes[J]. Acta Optica Sinica, 33(3): 0301007.

    [6] [6] R A Soref, D H Mcmahon. Tilting-mirror fiber-optic accelerometer[J]. Appl Opt, 1984, 23(3): 486-491.

    [7] [7] Feng Peng, Jun Yang, Bing Wu, et al.. Compact fiber optic accelerometer[J]. Chin Opt Lett, 2012, 10(1): 011201.

    [8] [8] Yang Ying, Li Xingfei, Li Hongyu, et al.. Acceleration sensor based on laser self-mixing interference[J]. Acta Optica Sinica, 2013, 33(2): 0228003.

    [10] [10] Bao Minhang. Analysis and Design Principles of MEMS Devices[M]. Amsterdam: Elsevier, 2005.

    [11] [11] Lin Xuehuang. Optical Passive Devices (1st Edition)[M]. Beijing: Posts & Telecom Press, 2000. 105-109.

    [12] [12] Huang Xianwu, Zheng Xiaoxia. Principle and Application of Transducer (2nd Edition)[M]. Beijing: Higher Education Press, 2004. 11.

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    Zhong Shaolong, Long Liang, Li Ming, Wu Yaming. Torsion-Sensitive Micro-Electro Mechanical Systems Accelerometer Sensor Based on Optical Fiber Detection Technology[J]. Chinese Journal of Lasers, 2014, 41(3): 305002

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    Paper Information

    Category: Optical communication

    Received: Aug. 20, 2013

    Accepted: --

    Published Online: Feb. 26, 2014

    The Author Email: Shaolong Zhong (shaolongzhong@mail.sim.ac.cn)

    DOI:10.3788/cjl201441.0305002

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