NUCLEAR TECHNIQUES, Volume. 48, Issue 1, 010503(2025)
Fabrication and performance optimization of SiC-based betavoltaic batteries
Figures & Tables(11)
Fig. 2. Relationship between doping concentrations ND and NA and depletion width (a), diffusion length (b), and reverse saturation current density (c)
Fig. 3. Relationship between ND and NA and short-circuit current (a), open-circuit voltage (b) and output power (c)
Fig. 4. Design of the P-type electrode for SiC-based betavoltaic cells
Fig. 5. Relationship between the total power loss rate η of the battery and H and L (color online)
Fig. 6. Process flow and material parameters for SiC-based betavoltaic battery
Fig. 7. (a) Semiconductor analyzer and probe station, (b) Microscopic view of betavoltaic battery testing
Fig. 8. J-V characteristic curves of betavoltaic batteries with different electrode structures in various environment (color online)(a) Source environment, (b) Dark environment
Table 1. Process parameters for preparing SiC Ohmic contacts
View tableView in ArticleTable 1. Process parameters for preparing SiC Ohmic contacts
掺杂类型
Doping type
金属化系统
Metallization system
掺杂浓度
Concentration / cm-3
退火环境
Annealing environment
比接触电阻
Specific resistance / Ω·cm2
参考文献
Reference
N型 Ni/Ti/Al/ 2×1019 800 ℃ 2 min 1.8×10-5 [ 30 ]Ti 1×1020 950 ℃ 3 min 7.7×10-4 Al/Ni 9×1018 800 ℃ 5.0×10-3 Ge/Ti/Al 4.5×1018 600 ℃ 30 min 1.0×10-4 Ni 1×1017 1 050 ℃ 10 min 6.0×10-6 [ 31 ]Ti/Ni 8×1018 950 ℃ 1 min 2.3×10-6 [ 32 ]P型 Ti/Al/W 1×1020 1100℃ 5.8×10-4 [ 33 ]Ni/Ti/Al/W 1×1020 750℃ 120 s 4.1×10-5 [ 34 ]Ni/Ti/Al/Ni 3×1019 800℃ 90 s 1.5×10-5 [ 35 ]Ge/Ti/Al 4.5×1018 600℃ 30 min 1.7×10-4 [ 36 ]
Table 2. Relevant parameters involved in the design of grid electrode patterns
View tableView in ArticleTable 2. Relevant parameters involved in the design of grid electrode patterns
变量Variable 变量含义Variable meaning 变量Variable 变量含义Variable meaning ηrd 扩散层电阻功率损失率
Diffusion layer resistance power loss rate
H 副栅线间距
Subgrid line spacing
ηrb 主栅线电阻功率损失率
Main grid line resistance power loss rate
La 主栅线长度
Main grid line length
ηrf 副栅线电阻功率损失率
Subgrid line resistance power loss rate
wb 主栅线宽度
Main grid line width
ηcf 副栅线接触电阻功率损失率
Subgrid line contact resistance power loss rate
hb 主栅线厚度
Main grid line thickness
ηs 栅线电极遮挡功率损失率
Grid line electrode shielding power loss rate
ρ□ 扩散层方块电阻
Diffusion layer square resistance
η 总功率损失率
Total power loss rate
ρc 副栅线接触电阻率
Subgrid line contact resistance
L 副栅线长度
Subgrid line length
ρp 金属电极电阻率
Metal electrode resistivity
wf 副栅线宽度
Subgrid line width
Vm 最大功率点电压
Maximum power point voltage
hf 副栅线厚度
Subgrid line thickness
Jm 最大功率点电流密度
Maximum power point current density
Table 3. Analysis results of betavoltaic battery testing
View tableView in ArticleTable 3. Analysis results of betavoltaic battery testing
电池编号
Battery ID
H
/ μm
JSC
/ nA·cm-2
VOC
/ V
FF J0
/ A·cm-2
Pout
/ nW·cm-2
ηtot
/ %
相对损失率
Relative loss
rate
参考文献
Reference
#1 1 000 13.43 1.32 0.83 8.9×10-17 14.69 2.82 0 本工作
This work
#2 750 12.85 1.34 0.81 1.4×10-16 13.99 2.69 4.8% #3 500 11.00 1.36 0.83 2.0×10-23 12.37 2.37 15.8% #4 250 10.29 1.44 0.79 1.2×10-23 11.66 2.24 20.6% #a — 17.03 0.45 0.28 5.9×10-10 2.13 0.26 — 本团队之前的工作[
39 ]Our previous work[
39 ]#b — 12.36 0.82 0.30 1.2×10-12 3.09 0.38 — #c — 16.41 0.53 0.56 5.3×10-10 4.84 0.60 —
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Houjun HE, Yuncheng HAN, Xiaoyu WANG, Lei REN, Xiangdong MENG, Mingjie ZHENG. Fabrication and performance optimization of SiC-based betavoltaic batteries[J]. NUCLEAR TECHNIQUES, 2025, 48(1): 010503
Paper Information
Category: NUCLEAR PHYSICS, INTERDISCIPLINARY RESEARCH
Received: Apr. 12, 2024
Accepted: --
Published Online: Feb. 26, 2025
The Author Email: HAN Yuncheng (韩运成)
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