Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum

Jun Cheng; Duk-Yong Choi

doi:10.3788/col201614.043501

Chinese Optics Letters, Volume. 14, Issue 4, 043501(2016)

Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum

Jun Cheng¹ and Duk-Yong Choi²

Author Affiliations

¹School of Electromechanical Engineering, Beijing Institute of Technology, Beijing1 00081 , China

²Centre for Ultrahigh bandwidth Devices for Optical Systems, Laser Physics Centre, Research School of Physics and Engineering, The Australian National University, Canberra, ACT2 601, Australia

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References(1)

[1] [1] J. Cheng, and N. Yan, Chin. Opt. Lett.13, 082201 (2015).

Cited By

[1] Zhen Bai, Jingsong Wei. Focusing error detection based on astigmatic method with a double cylindrical lens group. Optics & Laser Technology, 106, 145(2018).

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Jun Cheng, Duk-Yong Choi, "Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum," Chin. Opt. Lett. 14, 043501 (2016)

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Paper Information

Category: Other Areas of Optics

Received: --

Accepted: --

Published Online: Apr. 12, 2016

The Author Email:

DOI:10.3788/col201614.043501

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology