Collection Of theses on high power laser and plasma physics, Volume. 3, Issue 1, 82(2005)
Design and analysis of micro-positioning mechanism with large traveling range and high resolution
[4] [4] Stuart T. Smith. Flexures-elements of elastic mechanisms[M]. Gordon and Breach Science publishers, 2000. 373~388
[5] [5] Fredric E, Scire E, Clayton Teague. Piezodriven 50-μm range stage with subnanometer resolution[J]. Review of Scientific Instruments, 1978, 49(12): 1735~1740
[6] [6] Paros J M, Weisbord. How to design flexure hinges[J]. Machinge Design, 1965, 27: 151~156
[7] [7] Furukawa E, Mizuno M. Disphacement amplification and reduction by means of linkage[J]. Bull. Jpn. Soc. Precis. Eng., 1990, 24: 285~290
[8] [8] Koseki Yoshihiko, Tanikawa Tamio. Kinematic analysis of a t ranslational 3-d.o.f. micro-parallel mechanism using the matrix method[J]. Advanced Robotics, 2002, 16(3): 251~264
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and analysis of micro-positioning mechanism with large traveling range and high resolution[J]. Collection Of theses on high power laser and plasma physics, 2005, 3(1): 82