Fig. 1. Structural diagram of model of 241-element deformable mirror. (a) Back; (b) side

Fig. 2. Influence function of driver. (a) Surface of influence function; (b) curve of influence function

Fig. 3. Relationship among laser facula, sub-aperture and driver of sensor. (a) Laser facula; (b) alignment of sub-facula, sub-aperture, and drivers

Fig. 4. Process of simulation and calculation

Fig. 5. RMS value of residual fitting error of Zernike polynomial when distance of adjacent drivers is 9 mm. (a) Range of r is 1-3 mm; (b) range of r is 1-2 mm

Fig. 6. RMS value of residual fitting error of Zernike polynomial when distance of adjacent drivers is 10 mm. (a) Range of r is 1-3 mm; (b) range of r is 1-2 mm

Fig. 7. RMS value of residual fitting error of Zernike polynomial when distance of adjacent drivers is 11 mm. (a) Range of r is 1-3 mm; (b) range of r is 1-2 mm

Fig. 8. RMS value of residual fitting error of Zernike polynomial when radius of pale is 1 mm. (a) Range of d is 8-12 mm; (b) range of d is 10-12 mm

Fig. 9. RMS value of residual fitting error of Zernike polynomial when radius of pale is 1.5 mm. (a) Range of d is 8-12 mm; (b) range of d is 10-12 mm

Fig. 10. RMS value of residual fitting error of Zernike polynomial when radius of pale is 1-1.5 mm and distance of adjacent drivers is 9.5-10.5 mm. (a) Curves when distance of 9.5 mm is not deleted; (b) curves when distance of 9.5 mm is deleted

Fig. 11. Calculated curve of coupling factor of deformable mirror

Fig. 12. RMS value of residual fitting error of Zernike polynomial under different translation errors. (a) Translation error is 0-10 mm; (b) translation error is 0-4 mm

Fig. 13. RMS value of residual fitting error of Zernike polynomial when horizontal and vertical translation errors coexist. (a) Translation error is 0-10 mm; (b) translation error is 0-4 mm

Fig. 14. RMS value of residual fitting error of Zernike polynomial under different rotation errors. (a) Rotation error is 0°-10°; (b) rotation error is 0°-6°