Chinese Journal of Liquid Crystals and Displays, Volume. 37, Issue 10, 1317(2022)
Parasitic gate effect in photo-resist strip process
Fig. 2. Ioff corresponding to normal equipment and abnormal equipment
Fig. 3. Relationship between Al ion concentration and Ioff in stripper
Fig. 5. Transfer curves with different stripping time.（a）Different times for Com ITO strip in abnormal equipment；（b）Different times for TFT after Array process in abnormal equipment；（c）Normal samples and abnormal samples under illumination.
Fig. 6. Formation process and mechanism of parasitic gate effect.（a）Without Al2O3 parasitic gate；（b）With Al2O3 parasitic gate.
Fig. 7. Suppression of parasitic gate effects by back channel roughening
Fig. 8. Suppression effect of increasing PVX film thickness on parasitic gate effects
Table 1. Summary of experimental conditions
View tableView in ArticleTable 1. Summary of experimental conditions
实验区块 探究内容 TFT样品编号 区块一 正常设备、异常设备的光刻胶剥离液成分差异 - 区块二 剥离液中金属离子浓度与Ioff的关系 A1~A3 公共电极光刻胶剥离制程剥离次数对Ioff的影响 A4~A6 Array制程完成后采用公共电极光刻胶剥离清洗次数与Ioff的关系 B1、B2 区块三 钝化层成膜前等离子体处理抑制寄生栅极效应 C1~C3 钝化层膜厚增加抑制寄生栅极效应 D1、D2
Table 2. Comparison of stripper composition between normal equipment and abnormal equipment
View tableView in ArticleTable 2. Comparison of stripper composition between normal equipment and abnormal equipment
组分 单位 正常设备 异常设备 Al ×10-9 9.4 443.3 NMF ×10-2 51.38 51.65 MDG ×10-2 47.06 46.97 Amine ×10-2 1.5 1.36 Additive ×10-2 0.07 0.02 光刻胶 ×10-2 1.71 2.04
Table 3. Solutions for reducing parasitic currents
View tableView in ArticleTable 3. Solutions for reducing parasitic currents
减少有害流的措施 解决方案 解决方案的弊端 方案可行性 增加有害流的长度 TFT器件沟道
宽度L增加
底栅TFT开态电流Ion下降 否 降低有害流的密度 增加钝化层厚度，降低寄生电容 透过率下降，但可控 可行 降低钝化层介电常数，降低寄生电流 钝化层成膜质变化，需进行信赖性测试 否 减少有害流的导通性 钝化层成膜前等离子体处理延时，背沟道粗糙化 无 可行 钝化层成膜前等离子体处理功率增加，背沟道粗糙化 无 可行
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Dan LIU, Zhong-hao HUANG, Yi LIU, Xu WU, Tai-ye MIN, Fei GUAN, Liang FANG, Cheng-jun QI, Wei SHEN, Yong-qiang ZHAO, Zhi-yong NING, Hao-lan FANG. Parasitic gate effect in photo-resist strip process[J]. Chinese Journal of Liquid Crystals and Displays, 2022, 37(10): 1317
Category: Research Articles
Received: May. 8, 2022
Accepted: --
Published Online: Oct. 10, 2022
The Author Email: Zhong-hao HUANG (huangzhonghao@boe.com.cn)
