Chinese Journal of Lasers, Volume. 41, Issue 10, 1003010(2014)

Effect of Femtosecond Laser Parameters on TiC Ceramic Micro-Hole Drilling

Wang Yuqian1、*, Zhang Junzhan1, Liu Yongsheng2, Yang Xiaojun3, Li Weinan3, and Wang Chunhui2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Drilling micro-holes in TiC ceramic with femtosecond laser in different laser fluence and assisted gas pressure has been demonstrated. Scanning electron microscope (SEM), micrometer X-ray 3D imaging system (Micro-CT) and X-ray photoelectron spectroscopy (XPS) are used to investigate the morphology and chemical bonds of micro-holes. The results show that the circularities of micro-holes at the entry are not less than 99% when the laser fluence varies. The circularities of micro-holes at the exit increase as the laser fluence grows, then it tend to be stable. The maximum value of the circularity at the exit is 95%. The taper of micro-holes increases with the assisted gas pressure. When the laser fluence is 0.51 J/mm2, the taper of micro-holes drilled with 0.3 MPa gas pressure is the best, its long axis taper is -0.13° and the short axis taper is 0.77°. C-C bonds and Ti-C bonds rupture while debris which contains metal Ti、Ti2O3 and TiO2 forms around the micro-holes during laser drilling. Lastly, the mechanism of interactions between laser beam and materials is discussed.

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    Wang Yuqian, Zhang Junzhan, Liu Yongsheng, Yang Xiaojun, Li Weinan, Wang Chunhui. Effect of Femtosecond Laser Parameters on TiC Ceramic Micro-Hole Drilling[J]. Chinese Journal of Lasers, 2014, 41(10): 1003010

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    Paper Information

    Category: laser manufacturing

    Received: Apr. 1, 2014

    Accepted: --

    Published Online: Sep. 5, 2014

    The Author Email: Wang Yuqian (judie_wang@126.com)

    DOI:10.3788/cjl201441.1003010

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