Fig. 1. Simulation process

Fig. 2. Temperature distribution of unetched heater

Fig. 3. Schematic of temperature collection points

Fig. 4. The heater in the experiment box

Fig. 5. Temperature as a function of time

Fig. 6. Simulation of temperature distribution in unetched heater

Fig. 7. The simulation diagram of local area with changed resistance

Fig. 8. Etching temperature distribution diagram with different power consumptions

Fig. 9. Test point location