Holographic lithography of one-dimensional subwavelength infrared polarization gratings

Tianshi LU; Fuyuan DENG; Xinghui LI

doi:10.37188/OPE.20243221.3147

Optics and Precision Engineering, Volume. 32, Issue 21, 3147(2024)

Holographic lithography of one-dimensional subwavelength infrared polarization gratings

Tianshi LU¹, Fuyuan DENG¹, and Xinghui LI^1,2、*

Author Affiliations

¹Shenzhen International Graduate School， Tsinghua University， Shenzhen58055， China

²Tsinghua-Berkeley Shenzhen Institute， Tsinghua University， Shenzhen518055， China

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Tianshi LU, Fuyuan DENG, Xinghui LI. Holographic lithography of one-dimensional subwavelength infrared polarization gratings[J]. Optics and Precision Engineering, 2024, 32(21): 3147

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Paper Information

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Received: Jun. 13, 2024

Accepted: --

Published Online: Jan. 24, 2025

The Author Email: Xinghui LI (li.xinghui@sz.tsinghua.edu.cn)

DOI:10.37188/OPE.20243221.3147

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