Optics and Precision Engineering, Volume. 32, Issue 21, 3147(2024)

Holographic lithography of one-dimensional subwavelength infrared polarization gratings

Tianshi LU1, Fuyuan DENG1, and Xinghui LI1,2、*
Author Affiliations
  • 1Shenzhen International Graduate School, Tsinghua University, Shenzhen58055, China
  • 2Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen518055, China
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    Subwavelength gratings, as compact, easily integrable polarization-selective devices with high extinction ratios, hold significant potential for applications in remote sensing, material stress detection, anti-scattering imaging, and related fields, garnering widespread attention. In this study, we design a one-dimensional subwavelength grating polarization-selective device with high extinction ratios and high transmittance, along with an efficient fabrication method. Utilizing the effective medium theory and finite-difference time-domain simulations, we developed and modeled a one-dimensional subwavelength grating device featuring a double-layer metal structure optimized for holographic interference processing. This design offers robust duty cycle tolerance and facilitates the direct transfer of photoresist patterns. A holographic laser lithography system was constructed to fabricate one-dimensional gratings with dimensions of 30 mm×30 mm and a period of 800 nm. Compared to conventional techniques, this approach demonstrates significant advantages in processing efficiency, cost-effectiveness, and tunable periodicity. The transfer of photoresist patterns to metal gratings was achieved via silicon substrate etching and metal film deposition. The resulting gratings exhibit an average transmittance exceeding 45% and a maximum extinction ratio of 30 dB for infrared wavelengths in the range of 3-15 μm.

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    Tianshi LU, Fuyuan DENG, Xinghui LI. Holographic lithography of one-dimensional subwavelength infrared polarization gratings[J]. Optics and Precision Engineering, 2024, 32(21): 3147

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    Paper Information

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    Received: Jun. 13, 2024

    Accepted: --

    Published Online: Jan. 24, 2025

    The Author Email: Xinghui LI (li.xinghui@sz.tsinghua.edu.cn)

    DOI:10.37188/OPE.20243221.3147

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