Fig. 1. Schematic diagram of the three-dimensional structure （a） and cross-section （b） of AlGaInP-based Micro-LED structure with integrated subwavelength metal gate

Fig. 2. Equivalent refractive index of the TE-polarized and the TM-polarized at different duty cycles

Fig. 3. Effect of period on transmittance and extinction ratio of grating

Fig. 4. Curves showing the variation of the imaginary part of the effective refractive index of TM-polarized and TE-polarized light with the duty cycle

Fig. 5. Effect of duty cycle ratio on transmittance and extinc-tion ratio of grating

Fig. 6. Variation of the transmittance of TM polarized light with the thickness of the grating

Fig. 7. Effect of grating thickness on transmittance and extinction ratio of grating

Fig. 8. Effect of SiO₂ thickness on transmittance and extinc-tion ratio of grating

Fig. 9. Effect of the wavelength on the transmittance and extinction ratio of the grating

Fig. 10. Effect of the angle of incidence on the transmittance and extinction ratio of the grating

Fig. 11. Extinction ratio of LED with different chip sizes