Journal of Synthetic Crystals, Volume. 53, Issue 5, 781(2024)

Influence of VGF Indium Phosphide Single Crystal Furnace Heater on the Thermal Field Distribution in the Furnace

AI Jiaxin1, WAN Hongping2, QIAN Junbing1、*, and WEI Hua3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(14)

    [1] [1] KLAMKIN J, ZHAO H W, SONG B W, et al. Indium phosphide photonic integrated circuits: technology and applications[C]//2018 IEEE BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium (BCICTS). San Diego, CA, USA. IEEE, 2018: 8-13.

    [2] [2] ZHOU Y, ZHANG C W, WANG P J. Study on the regulation mechanism of electronic structure and optical properties of Fe doped InP[J]. Journal of Synthetic Crystals, 2013, 42(11): 2432-2438 (in Chinese).

    [3] [3] FENG Y H, SHEN G Y, ZHAO Y W, et al. Lattice perfection of dislocation-free (100) Te-GaSb single crystal polished substrate[J]. Journal of Synthetic Crystals, 2022, 51(6): 1003-1011 (in Chinese).

    [4] [4] LIANG R H, ZENG Z M, SUN N F, et al. Design and analysis of the thermal field of InP high pressure single crystal furnace[J]. Chinese Journal of Scientific Instrument, 2018, 39(11): 95-102 (in Chinese).

    [5] [5] ISHIKAWA Y, KOUNOIKE K, NISHIOKA M, et al. Preparation of n-type InP substrates by vertical boat growth[C]//2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM). Takamatsu, Japan. IEEE, 2010: 1-4.

    [6] [6] GAULT W A, MONBERG E M, CLEMANS J E. A novel application of the vertical gradient freeze method to the growth of high quality III-V crystals[J]. Journal of Crystal Growth, 1986, 74(3): 491-506.

    [7] [7] WU L X, LIU X L, YE S Z, et al. Low temperature photoluminescence study on LEC-InP single crystals[J]. Chinese Journal of Semiconductors, 1984, 5(2): 132-138 (in Chinese).

    [8] [8] SUN T N, SZULIN L, SHUTSENG K. The preparation of semi insulating and low dislocation density InP single crystals[C]//Proceedings of the Second International Conference on Semi-Indulating Ⅲ-Ⅴ Materials, 1982: 61-67.

    [9] [9] ZHAO Y W, DUAN M L, LU W, et al. VGF growth and property of 4 inch diameter InP single crystals with low dislocation density[J]. Journal of Synthetic Crystals, 2017, 46(5): 792-796 (in Chinese).

    [10] [10] SHAO H M, SUN N F, ZHANG X D, et al. High quality 6-inch InP single crystal grown by LEC method[J]. Semiconductor Technology, 2020, 45(8): 617-622+651 (in Chinese).

    [11] [11] ASAHI T, KAINOSHO K, KAMIYA T, et al. Growth of 100-mm-diameter InP single crystals by the vertical gradient freezing method[J]. Japanese Journal of Applied Physics, 1999, 38: 977.

    [12] [12] SHI Y L, SUN N F, XU C Y. Thermal field of 6-inch indium phosphide single crystal growth by semi-sealed Czochralski method[J]. Journal of Inorganic Materials, 2023, 38(3): 335-342.

    [13] [13] LI X. Study on convection and heat transfer during the growth of InP crystal by vertical temperature gradient method[D].Tianjin: Tianjin Polytechnic University, 2021: 17-54.(in Chinese)

    [14] [14] LIU J. Thermal field simulation and the effect of static magnetic field for directional solidification of multi-crystalline silicon[D].Nanchang: Nanchang University, 2016: 17-21 (in Chinese).

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    AI Jiaxin, WAN Hongping, QIAN Junbing, WEI Hua. Influence of VGF Indium Phosphide Single Crystal Furnace Heater on the Thermal Field Distribution in the Furnace[J]. Journal of Synthetic Crystals, 2024, 53(5): 781

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    Paper Information

    Category:

    Received: Nov. 22, 2023

    Accepted: --

    Published Online: Aug. 22, 2024

    The Author Email: QIAN Junbing (1226160701@qq.com)

    DOI:

    CSTR:32186.14.

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