Acta Optica Sinica, Volume. 44, Issue 14, 1412005(2024)

Differential Motion Grating Displacement Measurement System Based on Moiré Fringe Projection Imaging

YaoYunfei and Xu Gao*
Author Affiliations
  • School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China
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    References(15)

    [1] Lin X L, Su X B, Wang J N et al. Laser interferometer technology and instruments for sub-nanometer and picometer displacement measurements[J]. Laser & Optoelectronics Progress, 60, 0312016(2023).

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    [7] Hong Y F, Sato R, Shimizu Y et al. A new optical configuration for the surface encoder with an expanded Z-directional measuring range[J]. Sensors, 22, 3010(2022).

    [8] Yuan B, Yan H M, Cao X Q. A new subdivision method for grating-based displacement sensor using imaging array[J]. Optics and Lasers in Engineering, 47, 90-95(2009).

    [10] Zhang H Q. Design of a high-precision grating displacement measurement system based on FPGA[D], 22-31(2022).

    [11] Wang N. Research on nanolithography alignment methods in complex environments[D], 35-42(2016).

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    [15] Li S H, Gao X, Liu Z W et al. Algorithm for sub-pixel detection of fringe image displacement based on gray-level interpolation[J]. Acta Optica Sinica, 41, 1012002(2021).

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    YaoYunfei, Xu Gao. Differential Motion Grating Displacement Measurement System Based on Moiré Fringe Projection Imaging[J]. Acta Optica Sinica, 2024, 44(14): 1412005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 6, 2024

    Accepted: Apr. 7, 2024

    Published Online: Jul. 4, 2024

    The Author Email: Xu Gao (gaox19870513@163.com)

    DOI:10.3788/AOS240620

    CSTR:32393.14.AOS240620

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